Patents by Inventor Philip Fenn

Philip Fenn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • B-quartz glass-ceramic extreme ultraviolet optical elements and a method of making them
    Publication number: 20060135341
    Abstract: The invention is directed to a glass-ceramic material suitable for use in the manufacturing of EUVL reflective optics. The glass-ceramic materials is made from a composition that comprises (in wt. %): SiO2=64-70; Al2O3=18-24; Li2O=1.6-3.8; MgO=0.8-1.5; ZnO=0.7-4.2; BaO=0.1-1.4; TiO2=2.0-3.5; ZrO2=1.25-2.5; As2O3=0.1-1.0; Na2O<0.5; and K2O<0.5; and the glass-ceramic material has an aggregate coefficient of thermal expansion of ±1 ppm/° C. (±0.1×10?7/° C.) in the temperature range 0-200° C.
    Type: Application
    Filed: December 17, 2004
    Publication date: June 22, 2006
    Inventors: Adam Ellison, Philip Fenn