Patents by Inventor PHILIP J. CATALANO

PHILIP J. CATALANO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11077401
    Abstract: Embodiments of point-of-use (POU) abatement device and methods of abating a plurality of gas streams from a corresponding plurality of processing chambers are provided herein. In some embodiments, a compact POU abatement device includes a plurality of inlets respectively coupled to a plurality of process chambers in which each of the process chambers gas streams is isolated from the other gas streams. In some embodiments, the compact POU abatement device can include a plurality of oxidation devices and a corresponding plurality of wet scrubber columns each directly coupled to ones of the plurality of inlets to receive a gas stream from a corresponding process chamber.
    Type: Grant
    Filed: May 14, 2019
    Date of Patent: August 3, 2021
    Assignee: HIGHVAC CORPORATION
    Inventor: Philip J. Catalano
  • Publication number: 20190351369
    Abstract: Embodiments of point-of-use (POU) abatement device and methods of abating a plurality of gas streams from a corresponding plurality of processing chambers are provided herein. In some embodiments, a compact POU abatement device includes a plurality of inlets respectively coupled to a plurality of process chambers in which each of the process chambers gas streams is isolated from the other gas streams. In some embodiments, the compact POU abatement device can include a plurality of oxidation devices and a corresponding plurality of wet scrubber columns each directly coupled to ones of the plurality of inlets to receive a gas stream from a corresponding process chamber.
    Type: Application
    Filed: May 14, 2019
    Publication date: November 21, 2019
    Inventor: PHILIP J. CATALANO