Abstract: A faithful execution system includes system memory, a target processor, and protection engine. The system memory stores a ciphertext including value fields and integrity fields. The value fields each include an encrypted executable instruction and the integrity fields each include an encrypted integrity value for determining whether a corresponding one of the value fields has been modified. The target processor executes plaintext instructions decoded from the ciphertext while the protection engine is coupled between the system memory and the target processor. The protection engine includes logic to retrieve the ciphertext from the system memory, decrypt the value fields into the plaintext instructions, perform an integrity check based on the integrity fields to determine whether any of the corresponding value fields have been modified, and provide the plaintext instructions to the target processor for execution.

Abstract: A system for reading substrate carriers that includes at least one overhead transport vehicle (OHT) utilizing at least one device for at least one of sensing and/or reading a substrate carrier, and/or wafers arranged therein, when the substrate carrier is proximate the at least one overhead transport vehicle. A method of sensing or reading a substrate carrier includes sensing and/or reading a substrate carrier and/or wafers arranged therein with the overhead transport vehicle.

Abstract: A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Abstract: A system and storage medium for providing continuous communication between passive and active equipment are provided. The system includes a conversion unit coupled to at least one the passive and active equipment, which monitors signals received from the equipment. The signals relate to an equipment state. Upon detecting a state change, the system converts a signal associated with the state change to a TCP/IP-formatted request. The system also includes a message handler coupled to the conversion unit, which receives the request from the conversion unit and transmits the request to a host system. The message handler also removes TCP/IP formatting from the request resulting in a file transfer protocol message. The conversion unit converts the file transfer protocol message to a signal and responds to the signal by the equipment. The conversion includes decoding the file transfer protocol message and setting a signal line to a requested state.

Abstract: A steering apparatus and method is implemented that allows high speed, clean, particle-free transport of a semiconductor wafer or lithographic reticle on a transport vehicle at various positions on the vehicle track, especially when entering and exiting turns. Three computer-controlled electro-magnets are mounted at the left, center, and right side of a front steering truck, and are energized to attract strategically placed permanent magnet material mounted on a side of the track where the vehicle enters or exits a turn. The transport vehicle can be levitated by an air cushion or travel on wheels, and controlled by electromotive or electromagnetic forces about the track. Using the steering electro-magnets as a LVDT, a computer processor monitors the location of the transport vehicle about the track.

Abstract: A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Abstract: A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Abstract: A system for reading substrate carriers that includes at least one overhead transport vehicle (OHT) utilizing at least one device for at least one of sensing and/or reading a substrate carrier, and/or wafers arranged therein, when the substrate carrier is proximate the at least one overhead transport vehicle. A method of sensing or reading a substrate carrier includes sensing and/or reading a substrate carrier and/or wafers arranged therein with the overhead transport vehicle.

Abstract: A system and storage medium for providing continuous communication between passive and active equipment are provided. The system includes a conversion unit coupled to at least one the passive and active equipment, which monitors signals received from the equipment. The signals relate to an equipment state. Upon detecting a state change, the system converts a signal associated with the state change to a TCP/IP-formatted request. The system also includes a message handler coupled to the conversion unit, which receives the request from the conversion unit and transmits the request to a host system. The message handler also removes TCP/IP formatting from the request resulting in a file transfer protocol message. The conversion unit converts the file transfer protocol message to a signal and responds to the signal by the equipment. The conversion includes decoding the file transfer protocol message and setting a signal line to a requested state.

Abstract: Exemplary embodiments of the invention include a method and system for providing continuous communication between passive equipment and active equipment. The method includes monitoring signals received from a passive equipment or active equipment. The signals relate to at least one equipment state. Upon detecting a state change, the method also includes converting a signal associated with the state change to a TCP/IP-formatted request, and transmitting the request to a host system.

Abstract: Communication between a controller and a set of automated vehicles is improved by use of an RF link that employs a high frequency spread spectrum modem that establishes a low noise link in a high noise industrial environment and also shares the relevant frequency range with a wireless telephone system.