Patents by Inventor Philip M. Saizman

Philip M. Saizman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RF plasma reactor with hybrid conductor and multi-radius dome ceiling
    Patent number: 6248250
    Abstract: The present invention adheres to an optimized coil-domed geometry including a particular dome apex height range relative to the dome base and a particular wafer position range relative to the dome apex.
    Type: Grant
    Filed: July 21, 1997
    Date of Patent: June 19, 2001
    Assignee: Applied Materials Inc.
    Inventors: Hiroji Hanawa, Gerald Zheyao Yin, Diana Xiaobing Ma, Philip M. Saizman, Peter K. Loewenhardt, Allen Zhao