Abstract: In a coater for applying layers on large substrates, isolation between portions of the coater is provided by dual gate slit valve chambers. A dual gate slit valve has one gate on either side of a wall that has an opening. Gates are clear of the opening in the open position and cover the opening from both sides in the closed position. When one side of the dual gate slit valve chamber is at atmospheric pressure and the other is under vacuum, atmospheric pressure helps to keep the slit valve sealed by pushing one gate against the wall. This works regardless of which side of the valve is at atmosphere. One or more pumps may be mounted on the slit valve chamber.

Abstract: A module, such as a pump module or a sputtering module, comprises a lid assembly sufficient to fit or to cover a compartment, such as a pump compartment or a sputtering compartment, of a coating system, such as a modular coating system. A sputtering module comprises a power supply unit and is sufficient for receiving an electrical input and for delivering an electric output sufficient for sputtering in a sputtering compartment. A pump module, it comprises at least one pump and is sufficient for receiving an electrical input sufficient for operating the pump or pumps. Various connections between the module, external supplies, components or devices, and the compartment may be made automatically and/or manually. A control connection may be such that an external controller or a central controller is able to recognize a particular module that is associated with a particular compartment of the coating system.