Patents by Inventor Philip Xiaoli Feng

Philip Xiaoli Feng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Very low voltage, ultrafast nanoelectromechanical switches and resonant switches
    Patent number: 8115344
    Abstract: The invention provides lateral nanoelectromechanical switches useful for integration into circuitry fabricated using standard semiconductor processing methods, or using techniques compatible with the mainstream semiconductor processing technologies. Methods of fabricating the switches are described. Some exemplary designs for two and three terminal switches are provided. Descriptions of structural features and the operating parameters for some exemplary switches are given. The switches are expected to be compatible with circuitry that is operable in computer-based systems.
    Type: Grant
    Filed: August 24, 2009
    Date of Patent: February 14, 2012
    Assignee: California Institute of Technology
    Inventors: Philip Xiaoli Feng, Matthew Matheny, Rassul Karbalin, Michael L. Roukes
  • VERY LOW VOLTAGE, ULTRAFAST NANOELECTROMECHANICAL SWITCHES AND RESONANT SWITCHES
    Publication number: 20100140066
    Abstract: The invention provides lateral nanoelectromechanical switches useful for integration into circuitry fabricated using standard semiconductor processing methods, or using techniques compatible with the mainstream semiconductor processing technologies. Methods of fabricating the switches are described. Some exemplary designs for two and three terminal switches are provided. Descriptions of structural features and the operating parameters for some exemplary switches are given. The switches are expected to be compatible with circuitry that is operable in computer-based systems.
    Type: Application
    Filed: August 24, 2009
    Publication date: June 10, 2010
    Applicant: California Institute of Technology
    Inventors: Philip Xiaoli Feng, Matthew Matheny, Rassul Karbalin, Michael L. Roukes