Patents by Inventor Philipp Bartsch

Philipp Bartsch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20260118779
    Abstract: A mirror system comprises an EUV mirror. The EUV mirror comprises a mirror body and an optical surface with high EUV radiation reflectivity. The mirror system further comprises a frame structure which carries the mirror body, a fluid channel for a temperature control fluid, the fluid channel extending in a structure body of the mirror system, and a feed line for supplying the temperature control fluid to the fluid channel. The feed line has a temperature sensor for the temperature control fluid temperature. The temperature sensor is arranged outside of the cross section of the feed line. A method for operating a mirror system and a projection lens of a microlithography projection exposure apparatus are disclosed.
    Type: Application
    Filed: December 23, 2025
    Publication date: April 30, 2026
    Inventors: Joerg Starzmann, Julian ZIPS, Philipp Bartsch, Thomas MONZ, Martin BICKERT