Patents by Inventor Philipp Gaida

Philipp Gaida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATTENUATION METHOD, AND A DEVICE MANUFACTURING METHOD
    Publication number: 20240175479
    Abstract: A positioning system for moving or positioning a moveable object, the system including: a dynamic support system including a reaction mass, a first support, a first spring system to support the reaction mass from the first support, a second support, a second spring system to support the first support from the second support, and a damping system to provide damping to the dynamic support system; and an actuator for generating a driving force between the moveable object and the reaction mass for moving or position the object, wherein a first eigenfrequency and a second eigenfrequency of the dynamic support system are substantially the same.
    Type: Application
    Filed: April 11, 2022
    Publication date: May 30, 2024
    Applicants: ASML Netherlands B.V., Carl Zeiss SMT GmbH
    Inventors: Maarten Hartger KIMMAN, Hans BUTLER, Johannes,Petrus,Martinus,Bernardus VERMEULEN, Stefan TROGER, Michael ERATH, Philipp GAIDA
  • PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A VIBRATION DAMPER AND METHOD FOR DESIGNING A VIBRATION DAMPER
    Publication number: 20230081234
    Abstract: A projection exposure apparatus has a vibration damper with a holder and a mass that is connected to the holder via a damping element. The vibration damper comprises a temperature control device for the temperature control of the damping element. The disclosure also relates to a method for designing a vibration damper.
    Type: Application
    Filed: November 18, 2022
    Publication date: March 16, 2023
    Inventors: Philipp Gaida, Michael Erath, Florian Herold