Patents by Inventor Philipp Huebner

Philipp Huebner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11946950
    Abstract: An electro-optical circuit board can provide probe card functionality. The electro-optical circuit board includes at least one electrical conductor track and at least one optical beam path.
    Type: Grant
    Filed: October 5, 2020
    Date of Patent: April 2, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Philipp Huebner, Stefan Richter
  • Patent number: 11782088
    Abstract: Methods and apparatuses for testing a photonic integrated circuit and a corresponding sample holder and a photonic integrated circuit are provided. Here, a location for an illumination light beam can be selected by way of a scanning device, with the result that targeted coupling of the illumination light into the photonic integrated circuit is made possible.
    Type: Grant
    Filed: July 19, 2019
    Date of Patent: October 10, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Philipp Huebner, Stefan Richter
  • Publication number: 20210033643
    Abstract: An electro-optical circuit board can provide probe card functionality. The electro-optical circuit board includes at least one electrical conductor track and at least one optical beam path.
    Type: Application
    Filed: October 5, 2020
    Publication date: February 4, 2021
    Inventors: Philipp Huebner, Stefan Richter
  • Publication number: 20190339327
    Abstract: Methods and apparatuses for testing a photonic integrated circuit and a corresponding sample holder and a photonic integrated circuit are provided. Here, a location for an illumination light beam can be selected by way of a scanning device, with the result that targeted coupling of the illumination light into the photonic integrated circuit is made possible.
    Type: Application
    Filed: July 19, 2019
    Publication date: November 7, 2019
    Inventors: Philipp Huebner, Stefan Richter
  • Patent number: 10310385
    Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: June 4, 2019
    Assignee: Carl Zeiss AG
    Inventors: Philipp Huebner, Gerhard Krampert, Stefan Richter, Timo Mappes
  • Publication number: 20180275528
    Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
    Type: Application
    Filed: May 31, 2018
    Publication date: September 27, 2018
    Inventors: Philipp Huebner, Gerhard Krampert, Stefan Richter, Timo Mappes
  • Patent number: 9989862
    Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
    Type: Grant
    Filed: April 4, 2017
    Date of Patent: June 5, 2018
    Assignee: Carl Zeiss AG
    Inventors: Philipp Huebner, Gerhard Krampert, Stefan Richter, Timo Mappes
  • Publication number: 20170205715
    Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
    Type: Application
    Filed: April 4, 2017
    Publication date: July 20, 2017
    Inventors: Philipp Huebner, Gerhard Krampert, Stefan Richter, Timo Mappes