Abstract: A gantry-type positioning device includes a planar base parallel to first and second directions. Two first linear axes are arranged in the first direction, each having a first linear drive. A frame held by the first linear axes is movable in the first direction, and comprises two transverse and two longitudinal beams. The transverse beams carry second linear axes with second linear drives parallel to the second direction, so that a movable element arranged between the transverse beams is movably held by the second linear actuators. The frame is flexibly constructed such that the movable element is rotatable about a third direction which is perpendicular to the first and second directions. With respect to the third direction, the movable element is guidable by a guide surface of only one of the transverse beams serving as a guide beam for the movable element.

Abstract: A support member for a precision device includes a vertical support element and a horizontal support element. The vertical support element extends along a vertical main direction of extent and includes a material with a low thermal expansion coefficient. The horizontal support element horizontally surrounds at least a portion of the vertical support element and is configured to horizontally support the vertical support element against tilting from the main direction of extent. The horizontal support element bounds a thermally insulating interior space in which the vertical support element is partially accommodated.

Abstract: A gantry-type positioning device includes a planar base parallel to first and second directions. Two first linear axes are arranged in the first direction, each having a first linear drive. A frame held by the first linear axes is movable in the first direction, and comprises two transverse and two longitudinal beams. The transverse beams carry second linear axes with second linear drives parallel to the second direction, so that a movable element arranged between the transverse beams is movably held by the second linear actuators. The frame is flexibly constructed such that the movable element is rotatable about a third direction which is perpendicular to the first and second directions. With respect to the third direction, the movable element is guidable by a guide surface of only one of the transverse beams serving as a guide beam for the movable element.