Patents by Inventor Philipp Meinkuss

Philipp Meinkuss has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Projection exposure apparatus for semiconductor lithography including a magnetic damping arrangement
    Patent number: 11320753
    Abstract: A projection exposure apparatus for semiconductor lithography includes at least one component which is provided with a damping arrangement for dissipating mechanical vibration energy. The damping arrangement includes a ferromagnetic element, through which a magnetic field passes at least partly. The magnetic flux density is inhomogeneous at least regionally. The ferromagnetic element is mounted in such a way that it is movable with a movement component in the direction of the inhomogeneity of the magnetic field.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: May 3, 2022
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Philipp Meinkuss
  • PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING A MAGNETIC DAMPING ARRANGEMENT
    Publication number: 20210200101
    Abstract: A projection exposure apparatus for semiconductor lithography includes at least one component which is provided with a damping arrangement for dissipating mechanical vibration energy. The damping arrangement includes a ferromagnetic element, through which a magnetic field passes at least partly. The magnetic flux density is inhomogeneous at least regionally. The ferromagnetic element is mounted in such a way that it is movable with a movement component in the direction of the inhomogeneity of the magnetic field.
    Type: Application
    Filed: March 11, 2021
    Publication date: July 1, 2021
    Inventor: Philipp Meinkuss