Patents by Inventor Philipp REIBISCH

Philipp REIBISCH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inlet pressure perturbation insensitive mass flow controller
    Patent number: 10345829
    Abstract: A mass flow controller (10) comprises a fluid inlet (15) and at least one first flow meter (11) to measure a first flow rate (F1) and to output a first flow signal (FS1); at least one second flow meter (12) to measure a second flow (F2) rate and to output a second flow signal (FS2); a control device (13) connected to said first and second flow meters (11,12) and configured and arranged to generate a control signal (C); and at least one control valve (14) connected to said control device (13) to control a total flow rate (Fout) through the mass flow controller (10) in response to the control signal (C). The control signal (C) is generated as a function of both the first and second flow signals (FS1,FS2) such that the mass flow controller's (10) sensitivity to perturbations of said inlet pressure is minimized.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: July 9, 2019
    Assignee: SENSIRION AG
    Inventors: Mark Hornung, Thomas Huber, Philipp Reibisch, Andreas Rüegg
  • INLET PRESSURE PERTURBATION INSENSITIVE MASS FLOW CONTROLLER
    Publication number: 20170017246
    Abstract: A mass flow controller (10) comprises a fluid inlet (15) and at least one first flow meter (11) to measure a first flow rate (F1) and to output a first flow signal (FS1); at least one second flow meter (12) to measure a second flow (F2) rate and to output a second flow signal (FS2); a control device (13) connected to said first and second flow meters (11,12) and configured and arranged to generate a control signal (C); and at least one control valve (14) connected to said control device (13) to control a total flow rate (Fout) through the mass flow controller (10) in response to the control signal (C). The control signal (C) is generated as a function of both the first and second flow signals (FS1,FS2) such that the mass flow controller's (10) sensitivity to perturbations of said inlet pressure is minimized.
    Type: Application
    Filed: July 15, 2016
    Publication date: January 19, 2017
    Applicant: Sensirion AG
    Inventors: Mark HORNUNG, Thomas HUBER, Philipp REIBISCH, Andreas ROEGG