Patents by Inventor Philipp SIMON

Philipp SIMON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9798248
    Abstract: The invention relates to a method for producing a structure in a lithographic material, wherein the structure in the lithographic material is defined by means of a writing beam of an exposure device, in that a plurality of partial structures are written sequentially, wherein for writing the partial structures a write field of the exposure device is displaced and positioned sequentially and that a partial structure is written in the write field in each case, and wherein for positioning of the write field a reference structure is detected by means of an imaging measuring device.
    Type: Grant
    Filed: July 16, 2015
    Date of Patent: October 24, 2017
    Assignee: Nanoscribe GmbH
    Inventors: Joerg Hoffmann, Philipp Simon, Michael Thiel, Martin Hermatschweiler, Holger Fischer
  • Publication number: 20160041477
    Abstract: The invention relates to a method for producing a structure in a lithographic material, wherein the structure in the lithographic material is defined by means of a writing beam of an exposure device, in that a plurality of partial structures are written sequentially, wherein for writing the partial structures a write field of the exposure device is displaced and positioned sequentially and that a partial structure is written in the write field in each case, and wherein for positioning of the write field a reference structure is detected by means of an imaging measuring device.
    Type: Application
    Filed: July 16, 2015
    Publication date: February 11, 2016
    Inventors: Joerg HOFFMANN, Philipp SIMON, Michael THIEL, Martin HERMATSCHWEILER, Holger FISCHER
  • Patent number: D816139
    Type: Grant
    Filed: June 13, 2016
    Date of Patent: April 24, 2018
    Assignee: Carl Zeiss Meditec AG
    Inventors: Nadine Geller, Daniel Lindner, Frank Koenig, Philipp Simon, Jasmin Grosser
  • Patent number: D841445
    Type: Grant
    Filed: June 13, 2016
    Date of Patent: February 26, 2019
    Assignee: Carl Zeiss Meditec AG
    Inventors: Juergen Held, Philipp Simon, Jasmin Grosser