Abstract: The invention concerns a detection method for checking sealed product packages for leaks, characterized in that it comprises the following steps: at least one previously sealed product (2) is placed in an air, nitrogen, or oxygen atmosphere, in a chamber (3) (step 101), the pressure in the chamber (3) is lowered to a secondary vacuum pressure below 10?1 mbar and, while continuing the secondary vacuum pumping of the chamber (3), the gases contained in the chamber are ionized to monitor the change in the chamber (3) of the concentration of at least one gaseous species of the gas volume contained within the sealed product (2) chosen from among nitrogen, oxygen, or argon, by analysis by optical emission or mass spectrometry (step 102).

Abstract: The invention concerns a detection method for checking sealed product packages for leaks, characterised in that it comprises the following steps: at least one previously sealed product (2) is placed in an air, nitrogen, or oxygen atmosphere, in a chamber (3) (step 101), the pressure in the chamber (3) is lowered to a secondary vacuum pressure below 10?1 mbar and, while continuing the secondary vacuum pumping of the chamber (3), the gases contained in the chamber are ionised to monitor the change in the chamber (3) of the concentration of at least one gaseous species of the gas volume contained within the sealed product (2) chosen from among nitrogen, oxygen, or argon, by analysis by optical emission or mass spectrometry (step 102).

Abstract: A leak-testing method for a test container comprises measuring background noise within a chamber at atmospheric pressure with a trace sensor of volatile organic compounds that exhibit a measurement sensitivity less than or on the order of 1 ppb. Pollution is removed from an internal atmosphere of the chamber when the measurement of the background noise is greater than a predetermined threshold. The internal atmosphere of the chamber is mixed to homogenize a composition of the internal atmosphere receiving a container that defines a bounded internal space within which a volatile organic compound is present. A concentration of volatile organic compounds is measured within the atmospheric pressure chamber with the trace sensor of the volatile organic compounds. The measurement of the background noise is compared to the measurement of the concentration of the volatile organic compounds to detect the leak in the test container.

Abstract: The invention pertains to a leak-testing method for a test container comprising: a first step (102) during which volatile organic compound background noise is measured in an atmospheric pressure chamber, with a volatile organic compound trace sensor, and a second step (105) during which a volatile organic compound concentration is measured within the atmospheric pressure chamber receiving a container defining a bounded internal space within which a volatile organic compound is present, with the volatile organic compound trace sensor, and during which the measurement of the background noise is compared with the measurement of the volatile organic compound concentration, so as to detect a leak in said test container.

Abstract: The present invention relates to a sealed enclosure for transporting and storing semiconductor substrates, the enclosure comprising a sealed container and support means placed inside the container and including trays for supporting substrates. The container comprises two touching half-shells that can be spaced apart in order to open the container, and each end of said support means is secured mechanically to a respective one of said half-shells. The total height of said means varies depending on whether the container is opened or closed, the trays being separated from one another by equal distances. Said support means preferably comprise an alternation of segments and ball joints having end segments that are mechanically connected to respective ones of the half-shells. Under such circumstances, the total height of said support means varies by the alternation of segments and ball joints moving concertina-like.