Abstract: A system is disclosed for suspension of a mobile mass, such as an inertial angular sensor, including a connection device including first and second connection elements connected to each other through a connection block and deformable in bending in a mobility plane so as to enable displacements relative to the connection block, of the mobile mass connected to the first connection element, and of another element of the system connected to the second connection element such as a support or another mobile mass respectively, along two distinct directions respectively. At least one of the connection elements is formed from two springs, connecting the connection block to the mobile mass or the other element of the system respectively. The connection element thus has improved linearity properties.

Abstract: The invention relates to a sensor-type or actuator-type MEMS or NEMS device provided with a stacked stop element comprising —a first flat layer having a first flat electrode intended to be at a first electric potential and a second flat electrode intended to be at a second electric potential different from the first potential, said first flat electrode being movable relative to the second flat electrode in a first direction parallel to the first flat layer, —a second flat layer placed on top of the first flat layer and electrically insulated from the first flat layer by at least one intermediate layer made of an insulating material, the second flat layer comprising a first flat element that is mechanically secured to the first flat electrode, and a second flat element that is mechanically secured to the second flat electrode, characterized in that it further comprises at least one stop element extending from the first flat element or the second flat element in the first direction and projecting from said flat

Abstract: The invention concerns a resonator 1 configured to be integrated into an inertial angular sensor, said resonator 1 comprising at least one mass suspended by mechanical springs 5, a number N of pairs Pi (2?i?N) of electrostatic springs 50, said resonator 1 defining at least four axes of symmetry S1, S2, S3 and S4, characterized in that: each pair Pi consists of two electrostatic springs 50 each having a privileged axis of action, these electrostatic springs 50 being positioned so that their respective axes form a right angle; for at least one spring of one of the pairs and one spring of another pair, the angle formed by these two springs is equal to a predefined angle.

Abstract: The invention relates to a sensor-type or actuator-type MEMS or NEMS device provided with a stacked stop element comprising —a first flat layer having a first flat electrode intended to be at a first electric potential and a second flat electrode intended to be at a second electric potential different from the first potential, said first flat electrode being movable relative to the second flat electrode in a first direction parallel to the first flat layer, —a second flat layer placed on top of the first flat layer and electrically insulated from the first flat layer by at least one intermediate layer made of an insulating material, the second flat layer comprising a first flat element that is mechanically secured to the first flat electrode, and a second flat element that is mechanically secured to the second flat electrode, characterized in that it further comprises at least one stop element extending from the first flat element or the second flat element in the first direction and projecting from said flat

Abstract: A system is disclosed for suspension of a mobile mass, such as an inertial angular sensor, including a connection device including first and second connection elements connected to each other through a connection block and deformable in bending in a mobility plane so as to enable displacements relative to the connection block, of the mobile mass connected to the first connection element, and of another element of the system connected to the second connection element such as a support or another mobile mass respectively, along two distinct directions respectively. At least one of the connection elements is formed from two springs, connecting the connection block to the mobile mass or the other element of the system respectively. The connection element thus has improved linearity properties.