Abstract: An apparatus for plasma sterilization of articles includes a plasma generator, a sterilizing chamber, and a source of water vapor in fluid communication with the plasma generator, and may optionally include an autoclave. A method for plasma sterilization comprises exposing an article to be sterilized to a neutral active species of a plasma generated from water vapor. The exposure of the article to the plasma is carried out at reduced pressures and a chamber temperature of less than about 82.degree. C. for a time period sufficient to effect sterilization.

Abstract: Devices useful to monitor whether or not an article has been exposed to sterilizing conditions are provided and comprise a package and an indicator associated with the package. The package is sufficiently permeable to admit sterilizing gas or vapor into the package. The indicator associated with the package changes color from a first color (indicating ambient conditions) to a second color (indicating exposure to acidic gas or vapor). Both the first and second colors of the indicator are stable and preferably substantially maintain their colors under ambient conditions. Particularly, preferred embodiments are adapted for use with peracetic acid sterilization processes.

Abstract: An apparatus for plasma sterilization of articles is provided with a plasma generator, a sterilizing chamber, and a source of water vapor in fluid communication with the plasma generator, and may optionally include an autoclave. A method for plasma sterilization comprises exposing an article to be sterilized to a neutral active species of a plasma generated from water vapor. The exposure of the article to the plasma is carried out at reduced pressures and a chamber temperature of less than about 82.degree. C. for a time period sufficient to effect sterilization.

Abstract: Biological indicators are provided for use in validating and routinely monitoring oxidizing gas sterilizations. The biological indicators are based on Bacillus circulans spores that are enclosed in packages with sufficient permeability to admit a sterilizing amount of vapor while being substantially bacteria impermeable.

Abstract: A system for testing sterilization processes is provided by a vessel having a chamber, a plasma generator adapted to generate a plasma upstream of the chamber, a monitor associated with the chamber, and a biological or chemical indicator disposable within the chamber. The plasma generator generates upstream plasma that contains a plurality of atomic and/or molecular species, and the monitor is capable of determining a concentration of selected species in the plasma when flowing through the chamber.

Abstract: A method for plasma sterilization includes forming a gas plasma from a substantially oxygen-free mixture containing argon or helium and from 1% to 5% (v/v) hydrogen in a plasma generating chamber, and exposing an article to be sterilized in a sterilizing chamber to a non-explosive mixture of the plasma gas and from 1% up to 20% (v/v) oxygen gas. Preferably, the pressure in the sterilizing chamber is from 0.1 to 10 torr and the chamber temperature is less than 6.degree. C., the mixture from which the plasma is generated contains from 4% to 5% (v/v) hydrogen, and the article in the sterilizing chamber is exposed to a mixture of plasma gas and from 1% to 10% (v/v) oxygen.

Abstract: Copper etching process and product in which a material which promotes the formation of nitrous acid is included in the copper. The copper is etched in a nitric acid solution, and the nitrous acid catalyzes the reaction between the nitric acid and the copper. The catalyst promoter is distributed within the copper to control where the nitrous acid is formed and, hence, the manner in which the copper is etched. In one disclosed embodiment, the material which promotes the formation of nitrous acid increases in concentration toward the substrate, or board to which the copper is bonded. The nitrous acid reacts vigorously with the copper, and the etch rate increases as the etch progresses through the copper toward the substrate. A polymer and/or a nitrous acid scavenger can be included in the etching solution to confine the etching reaction to the region in which the nitrous acid is formed.

Abstract: Copper etching process and product in which a material which promotes the formation of nitrous acid is included in the copper. The copper is etched in a nitric acid solution, and the nitrous acid catalyzes the reaction between the nitric acid and the copper. The catalyst promoter is distributed within the copper to control where the nitrous acid is formed and, hence, the manner in which the copper is etched. In one disclosed embodiment, the material which promotes the formation of nitrous acid increases in concentration toward the substrate, or board to which the copper is bonded. The nitrous acid reacts vigorously with the copper, and the etch rate increases as the etch progresses through the copper toward the substrate. A polymer and/or a nitrous acid scavenger can be included in the etching solution to confine the etching reaction to the region in which the nitrous acid is formed.