Patents by Inventor Phillip Allan Kraus

Phillip Allan Kraus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma surface treatment for SI and metal nanocrystal nucleation
    Patent number: 7846793
    Abstract: A device, such as a nonvolatile memory device, and methods for forming the device in an integrated process tool are provided. The method includes depositing a tunnel oxide layer on a substrate, exposing the tunnel oxide layer to a plasma so that the plasma alters a morphology of a surface and near surface of the tunnel oxide to form a plasma altered near surface. Nanocrystals are then deposited on the altered surface of the tunnel oxide.
    Type: Grant
    Filed: October 3, 2007
    Date of Patent: December 7, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Christopher S. Olsen, Sean Seutter, Ming Li, Phillip Allan Kraus
  • PLASMA SURFACE TREATMENT FOR SI AND METAL NANOCRYSTAL NUCLEATION
    Publication number: 20090090952
    Abstract: A device, such as a nonvolatile memory device, and methods for forming the device in an integrated process tool are provided. The method includes depositing a tunnel oxide layer on a substrate, exposing the tunnel oxide layer to a plasma so that the plasma alters a morphology of a surface and near surface of the tunnel oxide to form a plasma altered near surface. Nanocrystals are then deposited on the altered surface of the tunnel oxide.
    Type: Application
    Filed: October 3, 2007
    Publication date: April 9, 2009
    Inventors: Christopher S. Olsen, Sean Seutter, Ming Li, Phillip Allan Kraus