Patents by Inventor Phillip D. Schumaker

Phillip D. Schumaker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system to measure characteristics of a film disposed on a substrate
    Patent number: 7019835
    Abstract: The present invention is directed to providing a method and system to measure characteristics of a film disposed on a substrate. The method includes identifying a plurality of processing regions on the film; measuring characteristics of a subset of the plurality of processing regions, defining measured characteristics; determining a variation of one of the measured characteristics; and associating a cause of the variations based upon a comparison of the one of the measured characteristics to measured characteristics associated with the remaining processing regions of the subset. The system carries out the aforementioned method.
    Type: Grant
    Filed: February 19, 2004
    Date of Patent: March 28, 2006
    Assignee: Molecular Imprints, Inc.
    Inventors: Ian M. McMackin, Phillip D. Schumaker, Byung-Jin Choi, Sidlgata V. Sreenivasan, Michael P. C. Watts