Patents by Inventor Phillip Earl Crabtree

Phillip Earl Crabtree has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing a thin oxide for use in semiconductor integrated circuits
    Patent number: 6146948
    Abstract: A method for forming a gate dielectric having different thickness begins by providing a substrate (12). A sacrificial oxide (14) is formed overlying the substrate (12). A first portion (11) of the sacrificial oxide (14) is exposed to a carbon-containing plasma environment (20). This carbon-containing plasma environment (20) forms a carbon-containing layer (24) within the region (11). After forming this region (24), a wet etch chemistry (22) is used to remove remaining portions of the sacrificial oxide (14) without forming a layer (24) in the region (13). Furnace oxidation is then used to form regions (26a) and (26b) wherein the growth of region (26a) has been retarded by the presence of the region (24). Therefore, the regions (26a) and (26b) are differing in thickness and can be used to make different transistors having different current gains.
    Type: Grant
    Filed: June 3, 1997
    Date of Patent: November 14, 2000
    Assignee: Motorola Inc.
    Inventors: Wei Edwin Wu, Hsing-Huang Tseng, Phillip Earl Crabtree, Yeong-Jyh Tom Lii