Patents by Inventor Piebe Anne Zijlstra

Piebe Anne Zijlstra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturing a MEMS element having cantilever and cavity on a substrate
    Patent number: 8097483
    Abstract: Method for manufacturing a capacitor on a substrate, the capacitor including a first electrode (5) and a second electrode (12; 25), the first and second electrodes being separated by a cavity (16; 32), the substrate including an insulating surface layer (3), the first electrode (5) being arranged on the insulating surface layer a first metal body (7a; 20) being adjacent to the first electrode and arranged as anchor of the second electrode (12; 25) the second electrode being arranged as a beam-shaped body (12; 25) located on the first metal body and above the first electrode; the cavity (16; 32) being laterally demarcated by a sidewall of the first metal body.
    Type: Grant
    Filed: October 15, 2008
    Date of Patent: January 17, 2012
    Assignee: Epcos AG
    Inventors: Robertus T. F. Van Schaijk, Piebe Anne Zijlstra, Ronald Koster, Pieter Simon Van Dijk
  • MANUFACTURING A MEMS ELEMENT HAVING CANTILEVER AND CAVITY ON A SUBSTRATE
    Publication number: 20100264498
    Abstract: Method for manufacturing a capacitor on a substrate, the capacitor including a first electrode (5) and a second electrode (12; 25), the first and second electrodes being separated by a cavity (16; 32), the substrate including an insulating surface layer (3), the first electrode (5) being arranged on the insulating surface layer a first metal body (7a; 20) being adjacent to the first electrode and arranged as anchor of the second electrode (12; 25) the second electrode being arranged as a beam-shaped body (12; 25) located on the first metal body and above the first electrode; the cavity (16; 32) being laterally demarcated by a sidewall of the first metal body.
    Type: Application
    Filed: October 15, 2008
    Publication date: October 21, 2010
    Applicant: EPCOS AG
    Inventors: Robertus T. F. Van Schaijk, Piebe Anne Zijlstra, Ronald Koster, Pieter Simon Van Dijk
  • Fuse structure for maintaining passivation integrity
    Patent number: 7763951
    Abstract: A fuse structure (106) includes a patterned conductor disposed over a passivation layer (302), which is disposed over a substrate (110), such as, for example, an inter-layer dielectric layer of an integrated circuit. A second passivation layer (112) is formed over the integrated circuit including over the fuse structure (106), and then patterned to open a window (108) through the second passivation layer (112) at a location over the fuse structure (106), with the window (108) fully landed by the underlying passivation layer (302). In various aspects of the present invention, the fuse (106) may be programmed either before or after the photoresist layer used in the patterning of the second passivation layer (112) is removed.
    Type: Grant
    Filed: September 18, 2004
    Date of Patent: July 27, 2010
    Assignee: NXP B.V.
    Inventors: Piebe Anne Zijlstra, Elizabeth Ann Killian
  • Fuse Structure for Maintaining Passivation Integrity
    Publication number: 20080296726
    Abstract: A fuse structure (106) includes a patterned conductor disposed over a passivation layer (302), which is disposed over a substrate (110), such as, for example, an inter-layer dielectric layer of an integrated circuit. A second passivation layer (112) is formed over the integrated circuit including over the fuse structure (106), and then patterned to open a window (108) through the second passivation layer (112) at a location over the fuse structure (106), with the window (108) fully landed by the underlying passivation layer (302). In various aspects of the present invention, the fuse (106) may be programmed either before or after the photoresist layer used in the patterning of the second passivation layer (112) is removed.
    Type: Application
    Filed: September 18, 2004
    Publication date: December 4, 2008
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.
    Inventors: Piebe Anne Zijlstra, Elizabeth Ann Killian