Abstract: A flow control apparatus for enriching gas containing oxygen with ozone includes a generator for producing the enriched mixture. A flow meter is connected to the generator outlet to measure the flow of the generated enriched gas. A mass flow control device is connected downstream of the flow meter. A flow control comparator compares a flow value as obtained from the measuring means and a preset constant value. A signal output of the flow control comparator is connected to a signal input of the mass flow control device for varying the mass flow in accordance with the comparison. An outlet of the mass flow control device is connected to an inlet of a compressor for compressing gas, the inlet gas pressure varying to keep compressed gas at a constant pressure. Feedback is provided between an outlet and an inlet of the compressor. A second mass control device is intermediately connected along the feedback connection for adjusting the mass flow of gas passing through the feedback means.

Abstract: A method for the generation of a supply of ozone containing process gas exhibiting high effective ozone content basically involves the steps of (a) providing a stream of an oxygen containing feed gas having a temperature not greater than about 50.degree. C. and an absolute pressure between about 1 and 3 bar, (b) subjecting the stream of feed gas to an electric discharge that transforms some of its oxygen content into ozone to produce a stream of ozone containing gas, and (c) compressing the ozone containing gas with simultaneous cooling thereof to produce a stream of ozone containing process gas having a temperature not greater than about the temperature of the feed gas, an absolute pressure greater than 3 bar and an absolute ozone partial pressure of at least 0.2 bar. Various systems for carrying out such methods are disclosed.