Abstract: Disclosed are improved micro-electrochemical sensor structures that uses cyclic voltammetry (CV) to perform electrochemical measurements on gaseous volatile organic compounds (VOC). The improved sensor structures include a Ag reference electrode layer and an adhesion SU-8 layer. Operationally, the oxidation of the Ag layer provides a reference potential that is used to determine the redox reactions occurring on the surface of Pt electrodes exposed to a flow of gaseous VOC. Experimentally, our improved sensor was used to detect methane dissolved in N2. The results show clear and reproducible oxidation signals that were attributed to the presence of methane in the gas flow. The position of this signal for methane was compared to CO, and was found to be clearly separated from it, proving the speciation capabilities of the sensor. In addition, our experiments showed that it is possible to use the current value to quantify the detected molecule in the gas flow.

Abstract: Disclosed are improved methods and structures for electrochemical sensors that may advantageously sense/detect chemical species including pollutants and/or energetics in a gaseous phase. Sensors according to the present disclosure may advantageously be fabricated using large scale microfabrication techniques and materials.

Abstract: Disclosed are improved methods and structures for electrochemical sensors that may advantageously sense/detect chemical species including pollutants and/or energetics in a gaseous phase. Sensors according to the present disclosure may advantageously be fabricated using large scale microfabrication techniques and materials.