Patents by Inventor Pierre G. Hraiz

Pierre G. Hraiz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030074098
    Abstract: A method is provided that includes (1) receiving information about a substrate processed within a barrier/seed layer deposition subsystem from an integrated inspection system of the subsystem; (2) determining an electroplating process to perform within an electroplating subsystem based at least in part on the information received from the inspection system of the barrier/seed layer deposition subsystem; (3) directing the electroplating subsystem to deposit a fill layer on the substrate based on the electroplating process; (4) receiving information about the fill layer from an integrated inspection system of the electroplating subsystem; (5) determining a planarization process to perform within a planarization subsystem based at least in part on the information received from the inspection system of the electroplating subsystem; and (6) directing the planarization subsystem to planarize the substrate based on the planarization process.
    Type: Application
    Filed: September 16, 2002
    Publication date: April 17, 2003
    Inventors: Robin W. Cheung, Suketu A. Parikh, Pierre G. Hraiz