Abstract: First and second sacrificial materials are deposited on a substrate. The first and second patterns are respectively formed in the first and second sacrificial materials. The first pattern made from the first sacrificial material is arranged on the second pattern made from a second sacrificial material. The first pattern leaves an area of predefined width free on the periphery of a top surface of the second pattern. The active layer covers at least the whole of the side walls of the first and second patterns and said predefined area of the second pattern. The active area is patterned so as to allow access to the first sacrificial material. The first and second sacrificial materials are selectively removed forming a mobile structure comprising a free area secured to the substrate by a securing area.

Abstract: An optical device having a deformable membrane comprising a flexible film having at least one peripheral anchoring zone, a central zone and an intermediate zone between the central zone and the anchoring zone. The membrane also includes one or more movable parts of electrostatic actuating means, each movable part being formed from a leg terminating on one side in a foot mechanically fastened to a film-fastening region located in the intermediate zone and terminating on the other side in a free end. The legs incorporate a movable electrode, the free end having to be attracted by a fixed electrode of the actuating means. The free end is placed facing the free end so as to deform at least the central zone of the membrane.

Abstract: An optical device having a deformable membrane comprising a flexible film having at least one peripheral anchoring zone, a central zone and an intermediate zone between the central zone and the anchoring zone. The membrane also includes one or more movable parts of electrostatic actuating means, each movable part being formed from a leg terminating on one side in a foot mechanically fastened to a film-fastening region located in the intermediate zone and terminating on the other side in a free end. The legs incorporate a movable electrode, the free end having to be attracted by a fixed electrode of the actuating means. The free end is placed facing the free end so as to deform at least the central zone of the membrane.

Abstract: The invention relates to a microsystem comprising a deformable bridge, the ends of which are connected to a substrate. According to the invention, at least one actuation electrode, which is solidly connected to the bridge, is disposed between the center of the bridge and one of the ends next to a counter electrode which is solidly connected to the substrate. The electrodes are intended to deform the deformable bridge such that a lower face of the bridge comes into contact with a contact element formed on the substrate.

Abstract: First and second sacrificial materials are deposited on a substrate. The first and second patterns are respectively formed in the first and second sacrificial materials. The first pattern made from the first sacrificial material is arranged on the second pattern made from a second sacrificial material. The first pattern leaves an area of predefined width free on the periphery of a top surface of the second pattern. The active layer covers at least the whole of the side walls of the first and second patterns and said predefined area of the second pattern. The active area is patterned so as to allow access to the first sacrificial material. The first and second sacrificial materials are selectively removed forming a mobile structure comprising a free area secured to the substrate by a securing area.

Abstract: The micromechanical device comprises a mobile beam attached via the two ends thereof to a rigid frame comprising two arms each having two ends. The ends of an arm are respectively secured to the two ends of the mobile beam. Each arm has a middle part arranged between the two ends of the corresponding arm. A rear face of the middle part of each arm is attached to a base support. The frame comprises at least one stressed element enabling the state of stress of the beam to be adjusted. The stressed element can be centered between the front face and the rear face of the corresponding arm. The frame can comprise pairs of front and rear stressed elements arranged facing one another respectively on the front face and on the rear face of the arms.

Abstract: The micromechanical device comprises a mobile beam attached via the two ends thereof to a rigid frame comprising two arms each having two ends. The ends of an arm are respectively secured to the two ends of the mobile beam. Each arm has a middle part arranged between the two ends of the corresponding arm. A rear face of the middle part of each arm is attached to a base support. The frame comprises at least one stressed element enabling the state of stress of the beam to be adjusted. The stressed element can be centered between the front face and the rear face of the corresponding arm. The frame can comprise pairs of front and rear stressed elements arranged facing one another respectively on the front face and on the rear face of the arms.

Abstract: The micromechanical switch comprises a deformable bridge (1), attached via its ends to a substrate (2), and actuating means (3) to deform the deformable bridge (1) so as to make an electric contact between a first conducting element (4) formed on the substrate (2), between the bridge (1) and the substrate (2), and a second conducting element (5), securedly affixed to a bottom face of the bridge. The second conducting element (5) is permanently connected, by means of a conducting line (6) securedly affixed to the bridge (1), to a third conducting element (7) arranged on the substrate (2) at the periphery of the bridge (1). The bridge (1) comprises a first insulating layer wherein a hole (10) is drilled, in which hole a conducting material is arranged salient from the bottom face of the bridge (1) so as to form the second conducting element (5).

Abstract: A deformable suspension bridge is attached to a substrate by two legs arranged in such a manner as to transversally subdivide the bridge into a medial segment arranged between the legs and into two outwardly projecting peripheral segments. Peripheral actuators and medial actuators enable the peripheral segments and the medial segment to be respectively and independently deformed perpendicularly to the substrate. As a result, an electrical contact between a first conductive element formed on the substrate, while being situated between the bridge and substrate, and a second conductive element, which is integrally secured to the underside of the bridge, can be made or broken, the switch whereby taking two mechanically stable positions.

Abstract: The invention relates to a microsystem comprising a deformable bridge, the ends of which are connected to a substrate. According to the invention, at least one actuation electrode, which is solidly connected to the bridge, is disposed between the center of the bridge and one of the ends next to a counter electrode which is solidly connected to the substrate. The electrodes are intended to deform the deformable bridge such that a lower face of the bridge comes into contact with a contact element formed on the substrate.

Abstract: A deformable suspension bridge is attached to a substrate by two legs arranged in such a manner as to transversally subdivide the bridge into a medial segment arranged between the legs and into two outwardly projecting peripheral segments. Peripheral actuators and medial actuators enable the peripheral segments and the medial segment to be respectively and independently deformed perpendicularly to the substrate. As a result, an electrical contact between a first conductive element formed on the substrate, while being situated between the bridge and substrate, and a second conductive element, which is integrally secured to the underside of the bridge, can be made or broken, the switch whereby taking two mechanically stable positions.

Abstract: The micromechanical switch comprises a deformable bridge (1), attached via its ends to a substrate (2), and actuating means (3) to deform the deformable bridge (1) so as to make an electric contact between a first conducting element (4) formed on the substrate (2), between the bridge (1) and the substrate (2), and a second conducting element (5), securedly affixed to a bottom face of the bridge. The second conducting element (5) is permanently connected, by means of a conducting line (6) securedly affixed to the bridge (1), to a third conducting element (7) arranged on the substrate (2) at the periphery of the bridge (1). The bridge (1) comprises a first insulating layer wherein a hole (10) is drilled, in which hole a conducting material is arranged salient from the bottom face of the bridge (1) so as to form the second conducting element (5).

Abstract: The invention relates to a microswitch containing conductors located on a first level and conductors located on a second level, where the conductors on the first level are supported by a deformable element which can switch by means of an actuator with a bimetallic effect, and where the effect of this switching is that the gap between the conductors on the first level and the conductors on the second level is modified, characterised in that the actuator with a bimetallic effect consists of resistors in close and localised contact with the deformable element, and in that the resistors are capable, when traversed by an electric control current, of expanding sufficiently under the effect of the heat produced by the passage of the electric command current to cause, by the bimetallic effect, the deformable element to trigger before the heat produced in the resistors has been able to propagate into the deformable element.

Abstract: The invention relates to a microswitch containing conductors located on a first level and conductors located on a second level, where the conductors on the first level are supported by a deformable element which can switch by means of an actuator with a bimetallic effect, and where the effect of this switching is that the gap between the conductors on the first level and the conductors on the second level is modified, characterised in that the actuator with a bimetallic effect consists of resistors in close and localised contact with the deformable element, and in that the resistors are capable, when traversed by an electric control current, of expanding sufficiently under the effect of the heat produced by the passage of the electric command current to cause, by the bimetallic effect, the deformable element to trigger before the heat produced in the resistors has been able to propagate into the deformable element.

Abstract: The invention relates to a vibrating microgyrometer incorporating a seismic mass (16) placed above a surface of a substrate (15) and attached to the surface by elastic supports arranged so as to enable the seismic mass (16) to move with respect to the substrate (15) in two directions x, y orthogonal to one another and orthogonal to the measurement axis of the microgyrometer. The microgyrometer also comprises excitation electrodes (40) making it possible to excite the seismic mass in the two mutually orthogonal directions and detection electrodes (41) making it possible to detect components of the Coriolis force, once again in the two mutually orthogonal directions.