Patents by Inventor Pieter Gerardus Mathijs Hoeijmakers

Pieter Gerardus Mathijs Hoeijmakers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contamination trap
    Patent number: 11982947
    Abstract: A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m?1 K?1.
    Type: Grant
    Filed: November 28, 2022
    Date of Patent: May 14, 2024
    Assignee: ASML NETHERLAND B.V.
    Inventors: Sander Catharina Reinier Derks, Daniel Jozef Maria Direcks, Maurice Wilhelmus Leonardus Hendricus Feijts, Pieter Gerardus Mathijs Hoeijmakers, Katja Cornelia Joanna Clasina Moors, Violeta Navarro Paredes, William Peter Van Drent, Jan Steven Christiaan Westerlaken
  • CONTAMINATION TRAP
    Publication number: 20230091648
    Abstract: A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m?1 K?1.
    Type: Application
    Filed: November 28, 2022
    Publication date: March 23, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Sander Catharina Reinier DERKS, Daniel Jozef Maria DIRECKS, Maurice Wilhelmus Leonardus Hendricus FEIJTS, Pieter Gerardus Mathijs HOEIJMAKERS, Katja Cornelia Joanna Clasina MOORS, Violeta NAVARRO PAREDES, William Peter VAN DRENT, Jan Steven Christiaan WESTERLAKEN
  • Contamination trap
    Patent number: 11556067
    Abstract: A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m?1K?1.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: January 17, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Sander Catharina Reinier Derks, Daniel Jozef Maria Direcks, Maurice Wilhelmus Leonardus Hendricus Feijts, Pieter Gerardus Mathijs Hoeijmakers, Katja Cornelia Joanna Clasina Moors, Violeta Navarro Paredes, William Peter Van Drent, Jan Steven Christiaan Westerlaken