Patents by Inventor Pieter Maria Hennus

Pieter Maria Hennus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20060119817
    Abstract: A lithographic apparatus for immersion lithography is disclosed in which a seal between different parts of the substrate table may be arranged to reduce the transmission of forces between the different parts.
    Type: Application
    Filed: December 8, 2004
    Publication date: June 8, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Pieter Maria Hennus, Jeroen Mara Mertens, Patrick Cornelus Hendrik Smulders, Peter Smits
  • Method and apparatus for positioning a substrate on a substrate table
    Publication number: 20050018167
    Abstract: The invention relates to a method for positioning a substrate relative to a substrate table, is presented. When the substrate is positioned on the substrate table for a first time, a first relative position of the substrate with respect to the substrate table is determined. When the substrate is positioned on the substrate table a second subsequent time, a second relative position of the substrate with respect to the substrate table is determined and the position of the substrate table with respect to the substrate is adjusted based on the first and second relative positions, so that the substrate is positioned with respect to the substrate table substantially equally to the first relative position.
    Type: Application
    Filed: June 25, 2004
    Publication date: January 27, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Pieter Maria Hennus, Jacob Vink