Patents by Inventor Pietro Binda

Pietro Binda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Grazing incidence collector optical systems for EUV and X-ray applications
    Patent number: 8594277
    Abstract: A collector optical system for EUV and X-ray applications is disclosed, wherein the system includes a plurality of mirrors arranged in a nested configuration that is symmetric about an optical axis. The mirrors have first and second reflective surfaces that provide successive grazing incidence reflections of radiation from a radiation source. The first and second reflective surfaces have a corrective shape that compensates for high spatial frequency variations in the far field intensity distribution of the radiation.
    Type: Grant
    Filed: January 28, 2009
    Date of Patent: November 26, 2013
    Assignee: Media Lario S.R.L.
    Inventors: Fabio Zocchi, Pietro Binda, Enrico Benedetti
  • Collector optical system
    Patent number: 8390785
    Abstract: A collector optical system is provided in which radiation is collected from a radiation source and directed to an image focus. The collector optical system includes one or more mirrors, with each mirror being symmetric about an optical axis extending through the radiation source and each mirror having at least first and second reflective surfaces. The first and second reflective surfaces have a common focus, such that radiation from the source undergoes successive grazing incidence reflections at the first and second reflective surface and wherein the common focus is transversely offset by a predetermined distance ?r with respect to the optical axis.
    Type: Grant
    Filed: September 3, 2007
    Date of Patent: March 5, 2013
    Assignee: Media Lario, S. R. L.
    Inventors: Fabio E. Zocchi, Pietro Binda, Enrico Benedetti
  • GRAZING INCIDENCE COLLECTOR OPTICAL SYSTEMS FOR EUV AND X-RAY APPLICATIONS
    Publication number: 20110043779
    Abstract: A collector optical system for EUV and X-ray applications is disclosed, wherein the system includes a plurality of mirrors arranged in a nested configuration that is symmetric about an optical axis. The mirrors have first and second reflective surfaces that provide successive grazing incidence reflections of radiation from a radiation source. The first and second reflective surfaces have a corrective shape that compensates for high spatial frequency variations in the far field intensity distribution of the radiation.
    Type: Application
    Filed: January 28, 2009
    Publication date: February 24, 2011
    Inventors: Fabio Zocchi, Pietro Binda, Enrico Benedetti
  • COLLECTOR OPTICAL SYSTEM
    Publication number: 20100096557
    Abstract: A collector optical system is provided in which radiation is collected from a radiation source and directed to an image focus. The collector optical system includes one or more mirrors, with each mirror being symmetric about an optical axis extending through the radiation source and each mirror having at least first and second reflective surfaces. The first and second reflective surfaces have a common focus, such that radiation from the source undergoes successive grazing incidence reflections at the first and second reflective surface and wherein the common focus is transversely offset by a predetermined distance ?r with respect to the optical axis.
    Type: Application
    Filed: September 3, 2007
    Publication date: April 22, 2010
    Inventors: Fabio E. Zocchi, Pietro Binda, Enrico Benedetti