Patents by Inventor Pietro Toscano

Pietro Toscano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated torsional-microbalance device in MEMS technology and fabrication process thereof
    Patent number: 8677824
    Abstract: A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: March 25, 2014
    Assignee: STMicroelectronics S.R.L.
    Inventors: Dario Paci, Francesco Pieri, Pietro Toscano
  • INTEGRATED TORSIONAL-MICROBALANCE DEVICE IN MEMS TECHNOLOGY AND FABRICATION PROCESS THEREOF
    Publication number: 20130081467
    Abstract: A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.
    Type: Application
    Filed: September 14, 2012
    Publication date: April 4, 2013
    Applicant: STMICROELECTRONICS S.R.L.
    Inventors: Dario Paci, Francesco Pieri, Pietro Toscano
  • Integrated torsional-microbalance device in MEMS technology and fabrication process thereof
    Patent number: 8281660
    Abstract: A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.
    Type: Grant
    Filed: December 9, 2009
    Date of Patent: October 9, 2012
    Assignee: STMicroelectronics S.r.l.
    Inventors: Dario Paci, Francesco Pieri, Pietro Toscano
  • INTEGRATED TORSIONAL-MICROBALANCE DEVICE IN MEMS TECHNOLOGY AND FABRICATION PROCESS THEREOF
    Publication number: 20100154544
    Abstract: A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.
    Type: Application
    Filed: December 9, 2009
    Publication date: June 24, 2010
    Applicant: STMicroelectronics S.r.l.
    Inventors: Dario Paci, Francesco Pieri, Pietro Toscano