Abstract: There are provided a piezoelectric actuator, an inkjet head assembly, and a method of manufacturing the same. The piezoelectric actuator includes upper and lower electrodes providing a driving voltage; and a piezoelectric body provided between the upper and lower electrodes and providing driving force to ink within each of a plurality of pressure chambers provided in an inkjet head, wherein the piezoelectric body includes branch portions separately provided on an upper portion of each of the plurality of pressure chambers and a large area portion connected to one end of each of the plurality of branch portions and integrally formed, and a connective electrode pattern is provided on a portion of each of the upper electrodes corresponding to the large area portion.

Abstract: There is provided an inkjet print head including: a nozzle substrate having a nozzle and a pressure chamber formed therein; and a vibrating substrate coupled to the nozzle substrate and transferring pressure from a piezoelectric actuator to the pressure chamber, wherein the vibrating substrate has a plurality of pores absorbing a pressure wave generated in a process of discharging ink.

Abstract: There are provided a piezoelectric actuator, an inkjet head assembly, and a method of manufacturing the same. The piezoelectric actuator includes: upper and lower electrodes providing driving voltage; and a piezoelectric substance formed between the upper and lower electrodes through solidifying a liquid piezoelectric substance, and providing driving force to ink in each of a plurality of pressure chambers provided in an inkjet head, wherein the piezoelectric substance includes a plurality of branch portions individually provided on an upper portion of each of the plurality of pressure chambers and a large area portion integrally provided while being connected to each of the plurality of branch portions at one ends of the plurality of branch portions.

Abstract: A method of manufacturing an ink-jet head is disclosed. The method in accordance with an embodiment of the present invention includes: forming a dividing groove such that one surface of a piezoelectric element is divided corresponding to the position of the chamber; filling the dividing groove with a filler; bonding one surface of the piezoelectric element to one surface of the ink-jet head in which the chamber is formed; and polishing the other surface of the piezoelectric element such that the filler is exposed.

Abstract: There is provided an ink path structure, including: a pressure chamber storing ink introduced thereinto to discharge the ink to a nozzle; and a path discharging the ink by pressure generated within the pressure chamber and then supplying the ink to the pressure chamber and being repeatedly expanded and contracted in a direction toward the pressure chamber to attenuate a residual pressure wave remaining in the pressure chamber.

Abstract: There is provided a method of manufacturing an inkjet head. A method of manufacturing an inkjet head according to an aspect of the invention may include: forming a piezoelectric actuator on a dummy substrate; cutting the piezoelectric actuator into head cell units of an inkjet head; preparing an inkjet head substrate including an ink chamber formed at a position corresponding to the piezoelectric actuator; bonding the dummy substrate and the inkjet head substrate to each other so that the piezoelectric actuator and the ink chamber correspond to each other; and removing the dummy substrate.

Abstract: There is provided an inkjet head assembly that includes: an inkjet head plate including an ink path; a piezoelectric actuator facing a pressure chamber in the inkjet head plate and providing driving force for ejecting ink to a nozzle from the pressure chamber; a package part stacked on the inkjet head plate and including a path moving ink introduced from the outside to an inlet of the inkjet head plate; and an electrical connector filling a via penetrating the package part and electrically connected with the piezoelectric actuator.

Abstract: There is provided a multi inkjet head package. The multi inkjet head package may include: a plurality of inkjet head assemblies each having a head plate in which an inkjet head discharging ink is housed; a rack in which the head plate is housed so as to expose the inkjet head; and a preliminary fixation portion that is installed on the rack and allows the head plate to be preliminarily fixed to the rack.

Abstract: There is provided an inkjet head and a manufacturing method thereof. The inkjet head includes an upper substrate formed of a silicon material and having an ink chamber storing ink provided therein; an intermediate substrate bonded to the upper substrate, formed of a low temperature co-fired ceramic material, and having a connection path and a restrictor provided therein while the connection path and the restrictor are connected to the ink chamber; and a lower substrate bonded to the intermediate substrate, formed of a silicon material, and having a nozzle connected to the connection path provided therein. According to the inkjet head and the manufacturing method thereof, the densification and facilitation of bonding between substrates are achieved by using anodic bonding between a silicon substrate and a ceramic substrate, thereby improving manufacturing yield.

Abstract: A method of manufacturing an ink-jet head is disclosed. The method in accordance with an embodiment of the present invention includes: forming a dividing groove such that one surface of a piezoelectric element is divided corresponding to the position of the chamber; filling the dividing groove with a filler; bonding one surface of the piezoelectric element to one surface of the ink-jet head in which the chamber is formed; and polishing the other surface of the piezoelectric element such that the filler is exposed.

Abstract: An ink-jet head is disclosed. The ink-jet head in accordance with an embodiment of the present invention, including a reservoir, which stores ink, a chamber, which is supplied with the ink from the reservoir, a restrictor, which connects the reservoir with the chamber, a nozzle, which ejects the ink, and a damper, which is interposed between the chamber and the nozzle, can include: a body, in which the chamber, the reservoir, the restrictor and the damper are formed; and a nozzle plate, which is coupled to the body and in which the nozzle is formed on the nozzle plate, in which the nozzle plate is made of a transparent material, and an observation window is formed on the nozzle plate and apart from the nozzle for observation of a meniscus formed in the nozzle.

Abstract: Disclosed is a method of manufacturing an ink-jet head including a reservoir storing ink, an inlet port through which the ink is provided to the reservoir, a chamber provided with the ink from the reservoir, a restrictor linking the reservoir and the chamber, and a nozzle through which the ink in the chamber is discharged. The method in accordance with an embodiment of the present invention includes: processing a first plate in which the inlet port is formed; processing a second plate in which the chamber and the inlet port are formed; bonding the first plate on an upper surface of the second plate; processing a third plate in which the restrictor and the reservoir are formed; processing a fourth plate by irradiating a femtosecond laser such that the nozzle is formed; bonding the fourth plate on a lower surface of the third plate, and bonding the third plate on a lower surface of the second plate.

Abstract: An electrostatic chuck and a substrate bonding device equipped with the electrostatic chuck are disclosed. The electrostatic chuck in accordance with an embodiment of the present invention includes: an elastic holder, in which a center portion of one surface of the elastic holder is formed in a convex shape; an electrode, which is coupled to the elastic holder such that the elastic holder is electrically charged; and a holding unit, which holds the other surface of the elastic holder. The electrostatic chuck in accordance with an embodiment of the present invention can prevent a defect caused by a void formed between substrates while bonding the substrates.

Abstract: Disclosed is an inkjet head. The inkjet head in accordance with an embodiment of the present invention can include a body in which a plurality of chambers divided by partitions are formed; a plurality of actuators coupled to one side of the body respectively such that pressure is supplied to each of the plurality of the chambers; and a fixture coupled to one side of the body in correspondence to a position of each of the partitions such that vibrations of the partitions are reduced.

Abstract: An ink-jet head and a method of manufacturing the ink-jet head are disclosed. The ink-jet head may include: an upper substrate, formed by processing a chamber in a silicon substrate; a middle substrate, bonded to the upper substrate and formed by processing an ink channel, which connects with the chamber, in a glass substrate; and a lower substrate, bonded to the middle substrate and formed by processing a nozzle, which connects with the ink channel, in a silicon substrate. With certain embodiments of the invention, a high level of precision may be obtained for the structures formed in the upper substrate and the lower substrate, and the middle substrate may be manufactured in low cost. Also, the substrates may be bonded together in a facilitated manner, so that production yield may be increased.

Abstract: An ink-jet head is disclosed. The ink-jet head may include: a chamber containing an ink; a reservoir connected with the chamber to supply the ink to the chamber; a restrictor connected with the chamber and the reservoir to control a flow of the ink; a nozzle connected with the chamber to jet the ink, and located at a position corresponding to where a pressure supplied to the chamber is the maximum; and an actuator supplying a pressure to the chamber such that the ink is jetted. The ink-jet may be operated with a lower driving voltage, and the ink may be jetted in a more stable manner.