Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having a treating space therein; a supply line having a first open/close valve installed thereon and configured to supply a treating fluid to the treating space; a heater installed on the supply line and configured to heat the treating fluid; an exhaust line having a second open/close valve installed thereon and configured to exhaust the treating space; and, a controller configured to control the first open/close value and the second open/close valve such that the treating fluid heated is supplied to and exhausted from the treating space before a treating process is performed on a substrate in the treating space.

Abstract: An apparatus and method for treating a substrate are provided. The apparatus includes at least one first process chamber configured to supply a developer onto the substrate; at least one second process chamber configured to treat the substrate using a supercritical fluid; a transfer chamber configured to transfer the substrate from the at least one first process chamber to the at least one second process chamber, while the developer supplied in the at least one first process chamber remains on the substrate; and a temperature and humidity control system configured to manage temperature and humidity of the transfer chamber by supplying a first gas of constant temperature and humidity into the transfer chamber.

Abstract: A compound is represented by Formula 1 below: wherein R1 to R4 are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a fluoro-substituted alkyl group having 1 to 6 carbon atoms, or a fluorine atom, wherein at least one among R1 to R4 is a fluorine atom, A is a divalent linking group, M1 and M2 are each independently potassium or sodium, and n and m are each independently an integer of 1 to 10.

Abstract: The polymer electrolyte membrane includes: a first ion conductive polymer layer; and a second ion conductive polymer layer disposed on at least one surface of the first ion conductive polymer layer, wherein the first ion conductive polymer layer comprises a first ion conductive polymer comprising a sulfonic acid group, wherein the second ion conductive polymer layer comprises a second ion conductive polymer comprising a carboxylic acid group, and wherein a thickness of the second ion conductive polymer layer is in a range of 1% to 80% of a thickness of the polymer electrolyte membrane. Further, disclosed are the method for preparing the same, the membrane-electrode assembly including the same, and the fuel cell including the same.

Abstract: A polymer electrolyte membrane for a fuel cell includes a cross-linking polymer in which a polyhedral oligomeric silsequioxane (POSS) is cross-linked with a hydrocarbon-based polymer and a membrane-electrode assembly for a fuel cell includes the polymer electrolyte membrane.

Abstract: Disclosed herein is a multi-axis force sensor which includes a vertical measurement module to measure a vertical component of force applied to a point of application, and a horizontal measurement module to measure a horizontal component of force applied to the point of application, wherein the vertical measurement module has a body horizontally moved by the horizontal component of force applied to the point of application, and the horizontal measurement module measures the horizontal component of force applied to the point of application, based on the movement of the body of the vertical measurement module.

Abstract: Disclosed herein is a multi-axis force sensor which includes a vertical measurement module to measure a vertical component of force applied to a point of application, and a horizontal measurement module to measure a horizontal component of force applied to the point of application, wherein the vertical measurement module has a body horizontally moved by the horizontal component of force applied to the point of application, and the horizontal measurement module measures the horizontal component of force applied to the point of application, based on the movement of the body of the vertical measurement module.

Abstract: A polymer electrolyte membrane for a fuel cell includes a cross-linking polymer in which a polyhedral oligomeric silsequioxane (POSS) is cross-linked with a hydrocarbon-based polymer and a membrane-electrode assembly for a fuel cell includes the polymer electrolyte membrane.

Abstract: A porous membrane with pores that includes a polymerization product of a polyazole-based material, an electrolyte membrane including the porous membrane with a proton-conductive polymer provided in pores of the porous membrane, methods of manufacturing the porous membrane and the electrolyte membrane, and a fuel cell employing at least one of the porous membrane and the electrolyte membrane.

Abstract: A compound including a cage-type structure of silsesquioxane wherein a group represented by Formula 1 or a salt thereof is directly linked to at least one silicon atom of the silsesquioxane, a composition including the compound, a composite formed therefrom, electrodes and an electrolyte membrane that include the composite, a method of preparing the compound, and a fuel cell including the electrodes and the electrolyte membrane. wherein in Formula 1, n is 1 or 2.

Abstract: An electrolyte membrane for a fuel cell includes: an inorganic ionic conductor including a trivalent metal element, a pentavalent metal element, phosphorous, and oxygen; and a polymer.

Abstract: A polymer comprising a first repeating unit represented by Formula 1: wherein R1 to R13 and Ar1 in Formula 1 are defined in the specification.

Abstract: A polymer comprising a first repeating unit represented by Formula 1: wherein R1 to R13 and Ar1 in Formula 1 are defined in the specification.

Abstract: An electrolyte membrane for fuel cells, the electrolyte membrane including a polymer film and a polymerization product of a composition comprising i) a plurality of inorganic particles surface-treated with a surface treatment agent including the polymerizable double bonds and ii) a polymerizable acid monomer, wherein the inorganic particles and the polymerizable acid monomer are impregnated within the polymer film.

Abstract: A polymer comprising a first repeating unit represented by Formula 1: wherein R1 to R13 and Ar1 in Formula 1 are defined in the specification.

Abstract: Organic/inorganic complex proton conductors are provided which display high proton conductivity over a wide temperature range. Electrodes for fuel cells which include the organic/inorganic complex proton conductors are also provided. The invention also advantageously provides electrolyte membranes for fuel cells including the organic/inorganic complex proton conductors, and fuel cells including the organic/inorganic complex proton conductors.

Abstract: A proton-conductive inorganic thin film including an inorganic proton conductor, a method of forming the proton-conductive inorganic thin film, and a fuel cell including the proton-conductive inorganic thin film as an electrolyte membrane.

Abstract: A composition including a cross-linkable compound and at least one selected from compounds represented by Formula 1, a composite obtained from the composition, an electrode including the composition or the composite, a composite membrane including the composite, and a fuel cell including the composite membrane, wherein, in Formula 1, a and R are as defined in the specification.

Abstract: A polymer comprising a first repeating unit represented by Formula 1: wherein R1 to R13 and Ar1 in Formula 1 are defined in the specification.

Abstract: An inorganic proton conductor for an electrochemical device and an electrochemical device using the inorganic proton conductor, the inorganic proton conductor including a tetravalent metallic element and an alkali metal.