Abstract: In a method of manufacturing a semiconductor device, a fin structure having a channel region protruding from an isolation insulating layer disposed over a semiconductor substrate is formed, a cleaning operation is performed, and an epitaxial semiconductor layer is formed over the channel region. The cleaning operation and the forming the epitaxial semiconductor layer are performed in a same chamber without breaking vacuum.

Abstract: A microphone with projector controller (working with a receiving device) is disclosed. The microphone of the present invention comprises a body, a processing unit, a sound collecting device, an analog-to-digital converter, a control unit and a transmitter. The processing unit is disposed inside the body. The sound collecting device is disposed at an appropriate location on the body so as to collect audio signals, which may then be converted to digital signals; the sound collecting device is connected with the processing unit. The analog-to-digital converter is disposed inside the body and connected with the processing unit so as to convert the signals sent to the processing unit. The control unit is disposed at an appropriate location on the body and is connected with the processing unit. The transmitter is connected with the processing unit. The audio signals collected by the sound collecting device and the command signals received by the control unit may be sent from the transmitter to the receiving device.