Patents by Inventor Pin-Hen Lin

Pin-Hen Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11411108
    Abstract: A semiconductor device includes a gate stack over a semiconductor substrate. A spacer extends along a first sidewall of the gate stack. An epitaxy structure is in the semiconductor substrate. A liner wraps around the epitaxy structure and has an outer surface in contact with the semiconductor substrate and an inner surface facing the epitaxy structure. The outer surface of the liner has a first facet extending upwards and towards the gate stack from a bottom of the first liner and a second facet extending upwards and towards an outer sidewall of the spacer from a top of the first facet to a top of the liner, such that a corner is formed between the first facet and the second facet, and the inner surface of the first liner defines a first curved corner pointing towards the corner formed between the first facet and the second facet.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: August 9, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen Chen, Chui-Ya Peng, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan
  • Publication number: 20210043771
    Abstract: A semiconductor device includes a gate stack over a semiconductor substrate. A spacer extends along a first sidewall of the gate stack. An epitaxy structure is in the semiconductor substrate. A liner wraps around the epitaxy structure and has an outer surface in contact with the semiconductor substrate and an inner surface facing the epitaxy structure. The outer surface of the liner has a first facet extending upwards and towards the gate stack from a bottom of the first liner and a second facet extending upwards and towards an outer sidewall of the spacer from a top of the first facet to a top of the liner, such that a corner is formed between the first facet and the second facet, and the inner surface of the first liner defines a first curved corner pointing towards the corner formed between the first facet and the second facet.
    Type: Application
    Filed: October 23, 2020
    Publication date: February 11, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen CHEN, Chui-Ya PENG, Ching YU, Pin-Hen LIN, Yen CHUANG, Yuh-Ta FAN
  • Patent number: 10818790
    Abstract: A semiconductor device includes a gate stack over a semiconductor substrate. A spacer extends substantially along a first sidewall of the gate stack. An epitaxy structure is in the semiconductor substrate. A liner wraps around the epitaxy structure and has an outer surface in contact with the semiconductor substrate and an inner surface facing the epitaxy structure. The outer surface of the liner has a first facet extending upwards and towards the gate stack from a bottom of the first liner and a second facet extending upwards and towards an outer sidewall of the spacer from a top of the first facet to a top of the liner, such that a corner is formed between the first facet and the second facet, and the inner surface of the first liner defines a first curved corner pointing towards the corner formed between the first facet and the second facet.
    Type: Grant
    Filed: June 7, 2019
    Date of Patent: October 27, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen Chen, Chui-Ya Peng, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan
  • Publication number: 20190312144
    Abstract: A semiconductor device includes a gate stack over a semiconductor substrate. A spacer extends substantially along a first sidewall of the gate stack. An epitaxy structure is in the semiconductor substrate. A liner wraps around the epitaxy structure and has an outer surface in contact with the semiconductor substrate and an inner surface facing the epitaxy structure. The outer surface of the liner has a first facet extending upwards and towards the gate stack from a bottom of the first liner and a second facet extending upwards and towards an outer sidewall of the spacer from a top of the first facet to a top of the liner, such that a corner is formed between the first facet and the second facet, and the inner surface of the first liner defines a first curved corner pointing towards the corner formed between the first facet and the second facet.
    Type: Application
    Filed: June 7, 2019
    Publication date: October 10, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen CHEN, Chui-Ya PENG, Ching YU, Pin-Hen LIN, Yen CHUANG, Yuh-Ta FAN
  • Patent number: 10319857
    Abstract: A semiconductor device includes a substrate, a liner, and an epitaxy structure. The substrate has a recess. The liner is disposed in the recess. The liner is denser than the substrate. The epitaxy structure is disposed in the recess. The liner is disposed between the epitaxy structure and the substrate.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: June 11, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen Chen, Chui-Ya Peng, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan
  • Publication number: 20180069120
    Abstract: A semiconductor device includes a substrate, a liner, and an epitaxy structure. The substrate has a recess. The liner is disposed in the recess. The liner is denser than the substrate. The epitaxy structure is disposed in the recess. The liner is disposed between the epitaxy structure and the substrate.
    Type: Application
    Filed: October 30, 2017
    Publication date: March 8, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen CHEN, Chui-Ya PENG, Ching YU, Pin-Hen LIN, Yen CHUANG, Yuh-Ta FAN
  • Patent number: 9812570
    Abstract: A semiconductor device includes a substrate, a liner, and an epitaxy structure. The substrate has a recess. The liner is disposed in the recess. The liner is denser than the substrate. The epitaxy structure is disposed in the recess. The liner is disposed between the epitaxy structure and the substrate.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: November 7, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen Chen, Chui-Ya Peng, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan
  • Publication number: 20170005196
    Abstract: A semiconductor device includes a substrate, a liner, and an epitaxy structure. The substrate has a recess. The liner is disposed in the recess. The liner is denser than the substrate. The epitaxy structure is disposed in the recess. The liner is disposed between the epitaxy structure and the substrate.
    Type: Application
    Filed: June 30, 2015
    Publication date: January 5, 2017
    Inventors: Chih-Fen CHEN, Chui-Ya PENG, Ching YU, Pin-Hen LIN, Yen CHUANG, Yuh-Ta FAN
  • Patent number: 7838158
    Abstract: The present invention provides a sheet anode based on modified zinc-aluminum alloys and Zinc-Air batteries containing the same. The sheet anode is consisted of ZnxAlyMz, wherein M comprises an element selected from the group consisting of alkaline metal and alkaline earth metal, or its further combination with at least one of Mn, Si and Cu; x, y and z each represents the weight percent of Zn, Al and M, and x+y+z=100; 2<y<50; and 0.5<z<6. The present invention also provides a sheet anode prepared from scrapped aluminum alloys, scrapped magnesium alloys, or scrapped zinc alloys, and the said sheet anode can be further made to be porous before use by proper etching.
    Type: Grant
    Filed: June 29, 2005
    Date of Patent: November 23, 2010
    Assignee: National Tsing Hua University
    Inventors: Tsung-Shune Chin, Chi-Jui Lan, Pin-Hen Lin
  • Publication number: 20060003228
    Abstract: The present invention provides a sheet anode based on modified zinc-aluminum alloys and Zinc-Air batteries containing the same. The sheet anode is consisted of ZnxAlyMz, wherein M comprises an element selected from the group consisting of alkaline metal and alkaline earth metal, or its further combination with at least one of Mn, Si and Cu; x, y and z each represents the weight percent of Zn, Al and M, and x +y+z=100; 2<y<50; and 0.5<z<6. The present invention also provides a sheet anode prepared from scrapped aluminum alloys, scrapped magnesium alloys, or scrapped zinc alloys, and the said sheet anode can be further made to be porous before use by proper etching.
    Type: Application
    Filed: June 29, 2005
    Publication date: January 5, 2006
    Applicant: NATIONAL TSING HUA UNIVERSITY
    Inventors: Tsung-Shune Chin, Chi-Jui Lan, Pin-Hen Lin