Abstract: A manufacturing method of a semiconductor structure including following steps is provided. A first sacrificial layer and a second sacrificial layer are formed in a first substrate. A first device layer including a first dielectric structure and a first landing pad is formed on the first substrate. A second device layer including a second dielectric structure and a second landing pad is formed on a second substrate. The first dielectric structure is bonded to the second dielectric structure. A portion of the first substrate is removed to expose the first sacrificial layer and the second sacrificial layer. An etch-back process is performed by using the first substrate as a mask to form a first opening exposing the first landing pad and a second opening exposing the second landing pad. A first TSV structure and a second TSV structure are respectively formed in the first opening and the second opening.

Abstract: A multi-phase coupled inductor includes a first iron core, a second iron core, and a plurality of coil windings. The first iron core includes a first body and a plurality of first core posts. The plurality of first core posts are connected to the first body. The second iron core is opposite to the first iron core. The second iron core and the first body are spaced apart from each other by a gap. The plurality of coil windings wrap around the plurality of first core posts, respectively. Each of the coil windings has at least two coils.