Abstract: A method includes forming a first metallic feature, forming a dielectric layer over the first metallic feature, etching the dielectric layer to form an opening, with a top surface of the first metallic feature being exposed through the opening, and performing a first treatment on the top surface of the first metallic feature. The first treatment is performed through the opening, and the first treatment is performed using a first process gas. After the first treatment, a second treatment is performed through the opening, and the second treatment is performed using a second process gas different from the first process gas. A second metallic feature is deposited in the opening.

Abstract: A method and apparatus for controlling a cellulosic pulp process for producing a pulp product having a desired pulp property is disclosed. The method involves illuminating an in-process portion of pulp using a first wavelength of light, and receiving a scattered light spectrum from the illuminated portion of pulp, the scattered light spectrum including spectral components that have been shifted in wavelength through interaction with a constituent of the illuminated portion of pulp. The method also involves filtering the scattered light spectrum to separate the spectral components, and identifying spectral features in the filtered scattered light spectrum that correspond to the pulp property. The method further involves generating a control signal for controlling the pulp process based on variations in the identified spectral features to cause the pulp property to fall within a desired range.

Abstract: A method and apparatus for controlling a cellulosic pulp process for producing a pulp product having a desired pulp property is disclosed. The method involves illuminating an in-process portion of pulp using a first wavelength of light, and receiving a scattered light spectrum from the illuminated portion of pulp, the scattered light spectrum including spectral components that have been shifted in wavelength through interaction with a constituent of the illuminated portion of pulp. The method also involves filtering the scattered light spectrum to separate the spectral components, and identifying spectral features in the filtered scattered light spectrum that correspond to the pulp property. The method further involves generating a control signal for controlling the pulp process based on variations in the identified spectral features to cause the pulp property to fall within a desired range.