Patents by Inventor Ping Chou LU

Ping Chou LU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Threaded dispense nozzle and alignment method and device for photoresist and other fluid coaters
    Patent number: 9358555
    Abstract: Provided is a fluid dispensing system with a dispense nozzle with a threaded outer surface and a fluid dispensing apparatus with a movable dispenser arm with an opening that includes threaded inner walls that receive the dispense nozzle therein. Also provided is a method for aligning a dispense head in a coating tool. Horizontal alignment is achieved by rotating the dispense nozzle until its tip is in contact with the chuck then laterally adjusting the dispenser arm position so that the tip is positioned over a center of the chuck. Vertical alignment is achieved by rotating the dispense nozzle until an indicia of the dispense nozzle is at the same vertical location as a designated physical feature of the dispenser arm.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: June 7, 2016
    Assignee: WAFERTECH, LLC
    Inventor: Ping Chou Lu
  • THREADED DISPENSE NOZZLE AND ALIGNMENT METHOD AND DEVICE FOR PHOTORESIST AND OTHER FLUID COATERS
    Publication number: 20140263481
    Abstract: Provided is a fluid dispensing system with a dispense nozzle with a threaded outer surface and a fluid dispensing apparatus with a movable dispenser arm with an opening that includes threaded inner walls that receive the dispense nozzle therein. Also provided is a method for aligning a dispense head in a coating tool. Horizontal alignment is achieved by rotating the dispense nozzle until its tip is in contact with the chuck then laterally adjusting the dispenser arm position so that the tip is positioned over a center of the chuck. Vertical alignment is achieved by rotating the dispense nozzle until an indicia of the dispense nozzle is at the same vertical location as a designated physical feature of the dispenser arm.
    Type: Application
    Filed: March 10, 2014
    Publication date: September 18, 2014
    Applicant: WaferTech, LLC
    Inventor: Ping Chou LU