Patents by Inventor Ping Chun Wei

Ping Chun Wei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Material of photoresist protect oxide
    Patent number: 6569784
    Abstract: A new layer of RPO is provided for semiconductor devices, specifically for semiconductor device having sub-micron device feature size. The layer of RPO that is provided by the invention comprises a layer of silicon-rich CVD oxide, having a refractive index of between about 1.57 and 1.60 to prevent silicon atoms that are present in a layer of polysilicon from diffusing into the overlying layer of resist protect oxide.
    Type: Grant
    Filed: July 20, 2001
    Date of Patent: May 27, 2003
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Ling Sung Wang, Ping Chun Wei, Chih Jen Wu, Yu Ping Chang, Su Ching Yuan, Jyh-Terng Shih