Abstract: A pellicle assembly includes a pellicle membrane with a nanotube layer formed from nanotubes having a minimum length of 1,000 ?m. The pellicle membrane can be formed with multiple layers and has a combination of high transmittance, low deflection, and small pore size. A conformal coating may applied to an outer surface of the pellicle membrane. The conformal coating is intended to protect the pellicle membrane from damage that can occur due to heat and hydrogen plasma created during EUV exposure.

Abstract: A micro-scale wireless heater includes: a support layer having first and second sides and a cavity formed on the second side; a first electrode plate and a first conduction line disposed on the second side; a second electrode plate and a coil both embedded into a slot on the first side, wherein the support layer is disposed between the first and second electrode plates forming a capacitor, the coil forms an inductor, and the slot communicates with the cavity; and a second conduction line disposed in the cavity. The first and second electrode plates are electrically connected together through the first and second conduction lines and the coil in order. Three exposed surfaces of the second electrode plate, the coil and the first side are flush with one another. The inductor and the capacitor convert an electromagnetic wave into heat. A fabrication method and applications thereof are also provided.

Abstract: A micro-scale wireless heater includes: a support layer having first and second sides and a cavity formed on the second side; a first electrode plate and a first conduction line disposed on the second side; a second electrode plate and a coil both embedded into a slot on the first side, wherein the support layer is disposed between the first and second electrode plates forming a capacitor, the coil forms an inductor, and the slot communicates with the cavity; and a second conduction line disposed in the cavity. The first and second electrode plates are electrically connected together through the first and second conduction lines and the coil in order. Three exposed surfaces of the second electrode plate, the coil and the first side are flush with one another. The inductor and the capacitor convert an electromagnetic wave into heat. A fabrication method and applications thereof are also provided.