Patents by Inventor Ping I. Chen

Ping I. Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Particle contamination apparatus for semiconductor wafer processing
    Patent number: 5496409
    Abstract: A semiconductor wafer processing system is disclosed which reduces particle accumulations in the wafer loading chamber during the pump down and vent cycle. A separate venting tube is provided which is positioned within the roughing tube used for the pump-down cycle. The venting tube is isolated from particulate matter which may be present in the roughing tube so that venting gas flow does not cause re-entry of the residual particulate matter into the loading chamber. The venting tube can be easily and inexpensively installed as a particle reduction kit into existing wafer processing systems.
    Type: Grant
    Filed: July 18, 1994
    Date of Patent: March 5, 1996
    Assignee: United Microelectronics Corporation
    Inventor: Ping I. Chen