Abstract: Semiconductor wafers, semiconductor devices, and methods of making semiconductor wafers and devices are provided. Embodiments of the present invention are especially suitable for use with substrate substitution applications, such in the case of fabricating vertical LED. One embodiment of the present invention includes a method of making a semiconductor device, the method comprising providing a substrate; forming a plurality of polishing stops on the substrate, each of the plurality of polishing stops including ceramic material; growing one or more buffer layers on the substrate; and growing one or more epitaxial layers on the one or more buffer layers. Additionally, the steps of applying one or more metal layers to the one or more epitaxial layers, affixing a second substrate to the one or more metal layers and removing the base substrate using a mechanical thinning process may be performed.