Patents by Inventor Ping-Ting Shen

Ping-Ting Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heating stage and apparatus having the same
    Patent number: 11104996
    Abstract: A heating stage includes a pedestal and a thermal-conductive plate. The thermal-conductive plate is located on the pedestal. The thermal-conductive plate has a central portion and an edge portion surrounding the central portion, and the edge portion comprises a first portion and a second portion connected to the first portion, where the first portion is sandwiched between the central portion and the second portion. A height of the second portion gradually decreases along a direction from the central portion toward the edge portion.
    Type: Grant
    Filed: November 27, 2018
    Date of Patent: August 31, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: P. Y. Chiou, Chih-Chun Huang, Ping-Ting Shen, L. S. Huang
  • HEATING STAGE AND APPARATUS HAVING THE SAME
    Publication number: 20190169748
    Abstract: A heating stage includes a pedestal and a thermal-conductive plate. The thermal-conductive plate is located on the pedestal. The thermal-conductive plate has a central portion and an edge portion surrounding the central portion, and the edge portion comprises a first portion and a second portion connected to the first portion, where the first portion is sandwiched between the central portion and the second portion. A height of the second portion gradually decreases along a direction from the central portion toward the edge portion.
    Type: Application
    Filed: November 27, 2018
    Publication date: June 6, 2019
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: P.Y. Chiou, Chih-Chun Huang, Ping-Ting Shen, L.S. Huang