Abstract: Methods and apparatus for providing a stage apparatus which is modular and allows for reaction force cancellation are described. According to one aspect of the present invention, a stage apparatus includes a table assembly and a first stage. The table assembly supports an object, e.g., a wafer or a reticle, which is to be moved. The first stage includes a counter mass arrangement, a plurality of carriages, and a plurality of linkages. The plurality of carriages is coupled to the table assembly through the plurality of linkages such that a first carriage and a second carriage are arranged to move in substantially opposite directions along a first axis to cause the table assembly to move along a second axis while reaction forces generated when the first carriage and the second carriage are substantially cancelled by the counter mass arrangement.

Abstract: Embodiments include a method for adjusting the twist of an air bearing surface of at least one slider to substantially match a target values for twist, the at least one slider having a back surface opposite the air bearing surface, the back surface including two sets of diagonally opposite corner regions, with each set including one corner region adjacent to a leading edge of the slider and one corner region adjacent to a trailing edge of the slider. The method includes forming a first mechanical scribe on the back surface extending through at least a portion of the corner regions adjacent to the leading edge of the slider and forming a second mechanical scribe on the back surface extending through at least a portion of the corner regions adjacent to the trailing edge of the slider.

Abstract: A method and apparatus for producing very high crown and camber curvature in slider materials using a laser processing system which produces fluence which is variable in a controllable manner, by applying a laser beam to the flex side of the slider material and varying the fluence of the laser beam to optimize the curvature in the slider material. The fluence is variable by finely controlling the power output of the laser or by changing the spot size of the laser beam. The beam spot size can be changed by using a focusing lens to establish a focal plane and then varying the relative positions of the slider relative and the focal plane. An apparatus for producing high crown and camber is also disclosed, as well as a slider produced by the process of applying a laser beam to the flex side of the slider material and varying the fluence of the laser beam to optimize the curvature in the slider material.

Abstract: Methods and apparatus for providing a stage apparatus which is modular and allows for reaction force cancellation are described. According to one aspect of the present invention, a stage apparatus includes a table assembly and a first stage. The table assembly supports an object, e.g., a wafer or a reticle, which is to be moved. The first stage includes a counter mass arrangement, a plurality of carriages, and a plurality of linkages. The plurality of carriages is coupled to the table assembly through the plurality of linkages such that a first carriage and a second carriage are arranged to move in substantially opposite directions along a first axis to cause the table assembly to move along a second axis while reaction forces generated when the first carriage and the second carriage are substantially cancelled by the counter mass arrangement.

Abstract: A vibration isolation system is provided. A frame is provided. A stage supported by the frame is provided. The stage comprises a stage body supported by the frame, a first isolation stage supported by the stage body, a first stage vibration isolation device that reduces vibrations transferred from the stage body to the first isolation stage, a second isolation stage supported by the first isolation stage, and a second stage vibration isolation device that reduces vibrations transferred from the first isolation stage to the second isolation stage.

Abstract: A method and apparatus for producing very high crown and camber curvature in slider materials using a laser processing system which produces fluence which is variable in a controllable manner, by applying a laser beam to the flex side of the slider material and varying the fluence of the laser beam to optimize the curvature in the slider material. The fluence is variable by finely controlling the power output of the laser or by changing the spot size of the laser beam. The beam spot size can be changed by using a focusing lens to establish a focal plane and then varying the relative positions of the slider relative and the focal plane. An apparatus for producing high crown and camber is also disclosed, as well as a slider produced by the process of applying a laser beam to the flex side of the slider material and varying the fluence of the laser beam to optimize the curvature in the slider material.

Abstract: A method and apparatus for producing very high crown and camber curvature in slider materials using a laser processing system which produces fluence which is variable in a controllable manner, by applying a laser beam to the flex side of the slider material and varying the fluence of the laser beam to optimize the curvature in the slider material. The fluence is variable by finely controlling the power output of the laser or by changing the spot size of the laser beam. The beam spot size can be changed by using a focusing lens to establish a focal plane and then varying the relative positions of the slider relative and the focal plane.

Abstract: Methods for adjusting the curvature of a slider may include providing a first slider including an air bearing surface and a back surface opposite the air bearing surface. The camber and crown of the first slider are measured, and a plurality of scribes are made at positions on the back surface of the first slider. The change in camber and crown due to each scribe on the first slider is measured. The scribe position and change in crown and camber per position is recorded in a data structure. A second slider is provided, the second slider including an air bearing surface and a back surface opposite the air bearing surface. The camber and crown of the second slider are measured. A desired amount of change in crown and camber is determined. Scribe positions are selected based on information from the data structure so that the desired amount of change in crown and camber will be obtained. The back surface of the second slider is scribed at the selected scribe positions.

Abstract: A process to reduce step heights in planarization of thin film carriers in an encapsulation system. The improvements include using an adhesive tape having a thinner adhesive thickness and a stiffer tape for the film sealing the encapsulant on the carrier to result in a low step height surface transition between the carrier and the cured encapsulant. The composition of the encapsulant is modified to reduce the shrinkage upon curing of the encapsulant. The encapsulant may include an absorbent that absorbs the irradiation and cause the top surface to harden first compared to the bulk of the encapsulant, and/or a gas-emitting additive that creates gaseous products that expand upon irradiation to thereby reduce the shrinkage of the encapsulant upon curing. Alternatively, irradiation at very low incidence angle relative to the top surface of the encapsulant causes the top surface to harden before the bulk of the encapsulant.

Abstract: Methods for adjusting the curvature of a slider may include providing a first slider including an air bearing surface and a back surface opposite the air bearing surface. The camber and crown of the first slider are measured, and a plurality of scribes are made at positions on the back surface of the first slider. The change in camber and crown due to each scribe on the first slider is measured. The scribe position and change in crown and camber per position is recorded in a data structure. A second slider is provided, the second slider including an air bearing surface and a back surface opposite the air bearing surface. The camber and crown of the second slider are measured. A desired amount of change in crown and camber is determined. Scribe positions are selected based on information from the data structure so that the desired amount of change in crown and camber will be obtained. The back surface of the second slider is scribed at the selected scribe positions.

Abstract: Embodiments include a method for adjusting the twist, crown and camber of an air bearing surface a slider to substantially match final target values for twist, crown and camber, the slider having a back surface opposite the air bearing surface, the back surface including two sets of diagonally opposite corner regions. The method includes the steps of measuring the twist, crown and camber of the at least one slider. A first group of twist scribes are formed on the back surface in one of the two sets of diagonally opposite corner regions. A first group of crown and camber scribes are formed on the back surface. The twist, crown and camber of the slider are measured and comparing to the final target values. Additional twist scribes are formed if the final target value for twist is not reached. Additional crown and camber scribes are formed if the final target values for crown and camber are not reached.

Abstract: Embodiments include a method for adjusting the twist of an air bearing surface of at least one slider to substantially match a target values for twist, the at least one slider having a back surface opposite the air bearing surface, the back surface including two sets of diagonally opposite comer regions, with each set including one comer region adjacent to a leading edge of the slider and one comer region adjacent to a trailing edge of the slider. The method includes forming a first mechanical scribe on the back surface extending through at least a portion of the corner regions adjacent to the leading edge of the slider and forming a second mechanical scribe on the back surface extending through at least a portion of the comer regions adjacent to the trailing edge of the slider.