Abstract: A probe device includes a case, a fixing base, a probe stage, a first camera and a first mirror. The case includes a bottom plate and a first side wall, which includes a first through hole and is vertically connected to the bottom plate. The fixing base, disposed inside the case, can move along a Z-axis direction. The probe stage, disposed inside the case, is used to carry a probe having a probe tip. The first camera is disposed outside the case and fixed to the first side wall. The first mirror is disposed relative to the first camera with a first angle formed between a surface of the first mirror and the normal line of the first camera. The first mirror can move along the Z-axis direction so that the first camera captures images of the probe tip through the first through hole via the first mirror.

Abstract: The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system.

Abstract: The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

Abstract: A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.

Abstract: This invention uses the pattern-based signal to accelerate the evaluation process as a means to replace complicated computing procedures. This invention is constructed through implementing absolute coordinates to produce pattern-based signals by position and two optical sensor signals, and through conducting the feature extraction process. This process produces feature signals of sidelong and overlapped issues. Furthermore, through transforming signals, feature signals can be handled by the digital data processor. Thus, this invention can achieve the three main objectives of wafer mapping.

Abstract: A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets through two worms, each worm gear set including a worm gear meshed with one worm, a radially extended locating plate fixedly fastened to the worm gear, and a gasket member having a rectangular center hole, two actuating bolts respectively fitted into the rectangular center hole and secured to the worm gear sets by a respective nut, keeping the locating plates of the worm gear sets maintained at right angles, two first stop pins adapted to stop the locating plates of the worm gear sets in a first position where the actuating bolts close the cover of the FOUP, and two second stop pins adapted to stop the locating plates of the worm gear sets in a second position where the actuating bolts open the cover of the FOUP.

Abstract: A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.

Abstract: An apparatus for preventing the over-tilt of a gripper assembly in a cassette loading device is described. The apparatus provides an additional sensor arm system rigidly mounted to the gripper assembly such that the additional sensor arm not only provides a method for it to reach an over-tilt position, but also provides a mechanical stop to manually stop the gripper assembly from making further motion beyond the maximum downward-tilt position of the arm. The apparatus may further be provided with a warning system and a manual override device such that a machine operator may be alerted of the over-tilt condition and further, may manually override the sensor system by temporarily restoring power to the gripper assembly and returning it to a safe position.

Abstract: The present invention discloses a support mechanism for laterally supporting an article on a platform by utilizing a stabilizing means such that when a support plate is in an upright position to laterally support an article situated on the platform, the stabilizing means is placed in a relaxed state for stabilizing the upright position of the support member. The stabilizing means can be advantageously an extensible spring or a compressible spring to be used to modify an existing loading/unloading apparatus and to achieve the desirable benefits of the present invention method and apparatus.