Patents by Inventor Piper A. Spry

Piper A. Spry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Aluminum contact etch mask and etchstop for tungsten etchback
    Patent number: 4997789
    Abstract: A method for forming CVD tungsten contacts in a planarized semiconductor body. The method utilizes aluminum as an etch mask and etch stop to prevent etching of underlying layers during contact formation.
    Type: Grant
    Filed: October 31, 1988
    Date of Patent: March 5, 1991
    Assignee: Texas Instruments Incorporated
    Inventors: Stephen A. Keller, Piper A. Spry, Martha S. Adams, Ralph G. Harper
  • Method of forming metal interconnects
    Patent number: 4920072
    Abstract: Metal interconnects and method for forming same such that an intermediately formed aluminum layer provides an etch stop and etch mask during the tungsten etch back. The method may be used to form tungsten contacts without requiring pre-metal planarization of the semiconductor body.
    Type: Grant
    Filed: October 31, 1988
    Date of Patent: April 24, 1990
    Assignee: Texas Instruments Incorporated
    Inventors: Stephen A. Keller, Piper A. Spry, Martha S. Adams, Ralph G. Harper