Patents by Inventor Pirmin Muffler

Pirmin Muffler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rotary plate for holding a substrate for a coating device
    Patent number: 10919071
    Abstract: A rotary plate for holding a substrate for a coating device, which rotary plate comprises a plurality of suction points, is intended to be characterized by an annular elevation, wherein a diameter of the annular elevation substantially corresponds to a diameter of the substrate.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: February 16, 2021
    Assignee: Obducat AB
    Inventor: Pirmin Muffler
  • Substrate plate
    Patent number: 10130971
    Abstract: A device for lacquering or coating a substrate is disclosed. The device includes a substrate plate configured to accommodate said substrate, and one or more suction points connected to, and extending upwardly from, the substrate plate. The one or more suction points may be configured to provide a vacuum to said substrate.
    Type: Grant
    Filed: January 3, 2013
    Date of Patent: November 20, 2018
    Assignee: solar-semi GmbH
    Inventor: Pirmin Muffler
  • ROTARY PLATE FOR HOLDING A SUBSTRATE FOR A COATING DEVICE
    Publication number: 20180036761
    Abstract: A rotary plate for holding a substrate for a coating device, which rotary plate comprises a plurality of suction points, is intended to be characterized by an annular elevation, wherein a diameter of the annular elevation substantially corresponds to a diameter of the substrate.
    Type: Application
    Filed: March 23, 2016
    Publication date: February 8, 2018
    Inventor: Pirmin MUFFLER
  • Device for machining a substrate and a method for this purpose
    Patent number: 9431284
    Abstract: In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.
    Type: Grant
    Filed: March 11, 2015
    Date of Patent: August 30, 2016
    Assignee: solar-semi GmbH
    Inventor: Pirmin Muffler
  • DEVICE FOR MACHINING A SUBSTRATE AND A METHOD FOR THIS PURPOSE
    Publication number: 20150187627
    Abstract: In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.
    Type: Application
    Filed: March 11, 2015
    Publication date: July 2, 2015
    Inventor: Pirmin Muffler
  • Device for machining a substrate and a method for this purpose
    Patent number: 9004497
    Abstract: In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: April 14, 2015
    Assignee: solar-semi GmbH
    Inventor: Pirmin Muffler
  • DEVICE FOR THE REMOVAL OF A COVERING FROM A SUBSTRATE AND A METHOD PERTAINING THERETO
    Publication number: 20150068556
    Abstract: A device (1) for removing a coating, particularly a photoresist, from a substrate (10) in at least one area of the substrate (10), comprises a nozzle (11) suitable for applying a jet of a solution medium to the substrate.
    Type: Application
    Filed: March 26, 2013
    Publication date: March 12, 2015
    Inventor: Pirmin Muffler