Abstract: A method of lithography process is provided. The method includes forming a conductive layer over a reticle. The method includes applying ionized particles to the reticle by a discharging device. The method includes forming a photoresist layer over a semiconductor substrate. The method includes securing the semiconductor substrate by a wafer electrostatic-clamp. The method also includes patterning the photoresist layer by emitting radiation from a radiation source via the reticle.

Abstract: A particle removal method for removing particles on the backside of a reticle is provided. The method includes disposing the reticle on a reticle holder. In addition, the method includes moving a baffle defining an enclosed area that encompasses a particle to be removed on a backside of the reticle. The method further includes spraying, by a solution spraying module of a particle removal device, a solution onto the particle. The method further includes sucking, by a sucking module of the particle removal device, the solution on the reticle with the particle. The method further includes emitting, by the particle removal device, a gas onto the backside of the reticle for drying the backside.

Abstract: The present disclosure provides a method for aligning a master oscillator power amplifier (MOPA) system. The method includes ramping up a pumping power input into a laser amplifier chain of the MOPA system until the pumping power input reaches an operational pumping power input level; adjusting a seed laser power output of a seed laser of the MOPA system until the seed laser power output is at a first level below an operational seed laser power output level; and performing a first optical alignment process to the MOPA system while the pumping power input is at the operational pumping power input level, the seed laser power output is at the first level, and the MOPA system reaches a steady operational thermal state.

Abstract: An autonomous positioning system for a mesh network, includes a mobile device receiving a first transmitting signal, a second transmitting signal and a third transmitting signal via the mesh network, obtaining a first, second, third received signal strength indicator (RSSI) corresponding to the first transmitting signal, the second transmitting signal, and the third transmitting signal; a first stationary access point transmitting the first transmitting signal via the mesh network and receives the a first, second, third received signal strength indicator (RSSI) and obtaining a position of the mobile device according to the first, second, third received signal strength indicator (RSSI); a second stationary access point transmitting the second transmitting signal via the mesh network; and a third stationary access point transmitting the third transmitting signal via the mesh network, wherein the first stationary access point receiving the second distance information and the third distance information.

Abstract: An autonomous positioning system for a mesh network, includes a mobile device receiving a first transmitting signal, a second transmitting signal and a third transmitting signal via the mesh network, obtaining a first, second ,third received signal strength indicator (RSSI) corresponding to the first transmitting signal, the second transmitting signal, and the third transmitting signal; a first stationary access point transmitting the first transmitting signal via the mesh network and receives the a first, second ,third received signal strength indicator (RSSI) and obtaining a position of the mobile device according to the first, second, third received signal strength indicator (RSSI); a second stationary access point transmitting the second transmitting signal via the mesh network; and a third stationary access point transmitting the third transmitting signal via the mesh network, wherein the first stationary access point receiving the second distance information and the third distance information.

Abstract: An autonomous positioning system for a mesh network, includes a mobile device receiving a first transmitting signal, a second transmitting signal and a third transmitting signal via the mesh network, obtaining a first, second, third received signal strength indicator (RSSI) corresponding to the first transmitting signal, the second transmitting signal, and the third transmitting signal; a first stationary access point transmitting the first transmitting signal via the mesh network and receives the a first, second, third received signal strength indicator (RSSI) and obtaining a position of the mobile device according to the first, second, third received signal strength indicator (RSSI); a second stationary access point transmitting the second transmitting signal via the mesh network; and a third stationary access point transmitting the third transmitting signal via the mesh network, wherein the first stationary access point receiving the second distance information and the third distance information.