Abstract: The present invention is to provide an auxiliary tool for dismantling a guide ring, and an application method of the same. The auxiliary tool of the present invention for dismantling a guide ring is to install a plurality of supporting elements on the top of a guide ring whose structure is the same as that of the guide ring to be dismantled, thereby dismantling the guide ring closely engaged with a top ring module, wherein the top ring module is used in a chemical-mechanical polishing (CMP) machine for carrying a wafer, and the guide ring to be dismantled is for holding the wafer within the top ring module. The application method of the auxiliary tool for dismantling a guide ring is first to insert the supporting elements of the auxiliary tool of the present invention into the grooves of the top ring modules, and thereafter to tap a combined surface of the guide ring and top ring module in a way like plotting a circle, so as to disengage the guide ring from the top ring module.

Abstract: The present invention is to provide an auxiliary tool for dismantling a guide ring, and an application method of the same. The auxiliary tool of the present invention for dismantling a guide ring is to install a plurality of supporting elements on the top of a guide ring whose structure is the same as that of the guide ring to be dismantled, thereby dismantling the guide ring closely engaged with a top ring module, wherein the top ring module is used in a chemical-mechanical polishing (CMP) machine for carrying a wafer, and the guide ring to be dismantled is for holding the wafer within the top ring module. The application method of the auxiliary tool for dismantling a guide ring is first to insert the supporting elements of the auxiliary tool of the present invention into the grooves of the top ring modules, and thereafter to tap a combined surface of the guide ring and top ring module in a way like plotting a circle, so as to disengage the guide ring from the top ring module.