Abstract: A semiconductor device includes a source/drain feature over a semiconductor substrate, channel layers over the semiconductor substrate and connected to the source/drain feature, a gate portion between vertically adjacent channel layers, and an inner spacer between the source/drain feature and the gate portion and between adjacent channel layers. The semiconductor device further includes an air gap between the inner spacer and the source/drain feature.

Abstract: A smart clothes for sensing heart physiological activities and lung respiratory conditions is provided, the smart clothes utilizes conductive connecting elements for being externally connected to a control module, such that the control module can be expanded or upgraded according to functional requirements. Further in the smart clothes, sensing elements and signal transmission wires are made of conductive fabric. As the conductive fabric sensing elements and signal transmission wires are well attached to a clothing body of the smart clothing, the sensing elements can be better adhered to human skin, and thereby sensing accuracy is improved.