Patents by Inventor Po-Han Wu

Po-Han Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240099154
    Abstract: A magnetoresistive random access memory (MRAM) device includes a first array region and a second array region on a substrate, a first magnetic tunneling junction (MTJ) on the first array region, a first top electrode on the first MTJ, a second MTJ on the second array region, and a second top electrode on the second MTJ. Preferably, the first top electrode and the second top electrode include different nitrogen to titanium (N/Ti) ratios.
    Type: Application
    Filed: November 21, 2023
    Publication date: March 21, 2024
    Applicant: UNITED MICROELECTRONICS CORP
    Inventors: Hui-Lin Wang, Si-Han Tsai, Dong-Ming Wu, Chen-Yi Weng, Ching-Hua Hsu, Ju-Chun Fan, Yi-Yu Lin, Che-Wei Chang, Po-Kai Hsu, Jing-Yin Jhang
  • Patent number: 11770924
    Abstract: A method of forming a semiconductor device includes the following steps. First of all, a substrate is provided, and a dielectric layer is formed on the substrate. Then, at least one trench is formed in the dielectric layer, to partially expose a top surface of the substrate. The trench includes a discontinuous sidewall having a turning portion. Next, a first deposition process is performed, to deposit a first semiconductor layer to fill up the trench and to further cover on the top surface of the dielectric layer. Following these, the first semiconductor layer is laterally etched, to partially remove the first semiconductor layer till exposing the turning portion of the trench. Finally, a second deposition is performed, to deposit a second semiconductor layer to fill up the trench.
    Type: Grant
    Filed: February 6, 2023
    Date of Patent: September 26, 2023
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Luo-Hsin Lee, Ting-Pang Chung, Shih-Han Hung, Po-Han Wu, Shu-Yen Chan, Shih-Fang Tzou
  • Patent number: 11683926
    Abstract: A method includes forming a stack of material layers to cover an array region and a periphery region of a substrate. A first patterned mask layer is formed, and the pattern of the first patterned mask layer is transferred to the stack of material layers, thereby forming a first array pattern and a first periphery pattern respectively in the array and periphery regions. A second patterned mask layer is provided above the first array and periphery patterns. The pattern of the second patterned mask is not aligned with the pattern of the first patterned mask. The pattern of the second patterned mask layer is transferred to form the first and second sacrificial patterns respectively in the array and periphery regions. The first array pattern, the first and second sacrificial patterns, and the first periphery pattern are simultaneously transferred to form a second array pattern and a second periphery pattern.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: June 20, 2023
    Assignee: WINBOND ELECTRONICS CORP.
    Inventors: Po-Han Wu, Pai-Chun Tsai, Tzu-Ming Ou Yang, Shu-Ming Lee
  • Publication number: 20230189498
    Abstract: A method of forming a semiconductor device includes the following steps. First of all, a substrate is provided, and a dielectric layer is formed on the substrate. Then, at least one trench is formed in the dielectric layer, to partially expose a top surface of the substrate. The trench includes a discontinuous sidewall having a turning portion. Next, a first deposition process is performed, to deposit a first semiconductor layer to fill up the trench and to further cover on the top surface of the dielectric layer. Following these, the first semiconductor layer is laterally etched, to partially remove the first semiconductor layer till exposing the turning portion of the trench. Finally, a second deposition is performed, to deposit a second semiconductor layer to fill up the trench.
    Type: Application
    Filed: February 6, 2023
    Publication date: June 15, 2023
    Applicants: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Luo-Hsin Lee, Ting-Pang Chung, Shih-Han Hung, Po-Han Wu, Shu-Yen Chan, Shih-Fang Tzou
  • Patent number: 11631679
    Abstract: A method of forming a semiconductor device includes the following steps. First of all, a substrate is provided, and a dielectric layer is formed on the substrate. Then, at least one trench is formed in the dielectric layer, to partially expose a top surface of the substrate. The trench includes a discontinuous sidewall having a turning portion. Next, a first deposition process is performed, to deposit a first semiconductor layer to fill up the trench and to further cover on the top surface of the dielectric layer. Following these, the first semiconductor layer is laterally etched, to partially remove the first semiconductor layer till exposing the turning portion of the trench. Finally, a second deposition is performed, to deposit a second semiconductor layer to fill up the trench.
    Type: Grant
    Filed: May 10, 2022
    Date of Patent: April 18, 2023
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Luo-Hsin Lee, Ting-Pang Chung, Shih-Han Hung, Po-Han Wu, Shu-Yen Chan, Shih-Fang Tzou
  • Publication number: 20230078443
    Abstract: A method includes forming a stack of material layers to cover an array region and a periphery region of a substrate. A first patterned mask layer is formed, and the pattern of the first patterned mask layer is transferred to the stack of material layers, thereby forming a first array pattern and a first periphery pattern respectively in the array and periphery regions. A second patterned mask layer is provided above the first array and periphery patterns. The pattern of the second patterned mask is not aligned with the pattern of the first patterned mask. The pattern of the second patterned mask layer is transferred to form the first and second sacrificial patterns respectively in the array and periphery regions. The first array pattern, the first and second sacrificial patterns, and the first periphery pattern are simultaneously transferred to form a second array pattern and a second periphery pattern.
    Type: Application
    Filed: September 15, 2021
    Publication date: March 16, 2023
    Inventors: Po-Han WU, Pai-Chun TSAI, Tzu-Ming OU YANG, Shu-Ming LEE
  • Publication number: 20230067536
    Abstract: A semiconductor memory structure includes a substrate, a bit line disposed on the substrate, a dielectric liner disposed on a side of the bit line, and a capacitor contact and a filler disposed on the substrate. The bit line extends in a first direction. The dielectric liner includes a first nitride liner disposed on a sidewall of the bit line, an oxide liner disposed on a sidewall of the first nitride liner, and a second nitride liner disposed on a sidewall of the oxide liner. In a second direction perpendicular to the first direction, the capacitor contact is spaced apart from the bit line by the first nitride liner, the oxide liner, and the second nitride liner, and the width of the filler is greater than the width of the capacitor contact. A method for forming the semiconductor memory structure is also provided.
    Type: Application
    Filed: September 1, 2021
    Publication date: March 2, 2023
    Inventors: Chien-Ming LU, Po-Han WU
  • Publication number: 20220405920
    Abstract: A portable medical education device, medical education platform, and medical education methods are disclosed. The medical education portable device enables a camera to capture a specific picture to generate an image, extracts several features from the image, converts the features into an identification code, and transmits the identification code to the medical education platform. The medical education platform stores several three-dimensional medical models and finds a specific three-dimensional medical model from the three-dimensional medical models according to the identification code, wherein the preset code corresponding to the specific three-dimensional medical model is the same as the identification code.
    Type: Application
    Filed: March 28, 2022
    Publication date: December 22, 2022
    Inventors: Ding-Han WANG, Chun-Yen LU, Ming-Lun HSU, Yi-Chen HSU, Ngoc Trang TRAN THI, Juin-Hong CHERNG, Po-Han WU, Chia-Yu LIN
  • Publication number: 20220271037
    Abstract: A method of forming a semiconductor device includes the following steps. First of all, a substrate is provided, and a dielectric layer is formed on the substrate. Then, at least one trench is formed in the dielectric layer, to partially expose a top surface of the substrate. The trench includes a discontinuous sidewall having a turning portion. Next, a first deposition process is performed, to deposit a first semiconductor layer to fill up the trench and to further cover on the top surface of the dielectric layer. Following these, the first semiconductor layer is laterally etched, to partially remove the first semiconductor layer till exposing the turning portion of the trench. Finally, a second deposition is performed, to deposit a second semiconductor layer to fill up the trench.
    Type: Application
    Filed: May 10, 2022
    Publication date: August 25, 2022
    Applicants: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Luo-Hsin Lee, Ting-Pang Chung, Shih-Han Hung, Po-Han Wu, Shu-Yen Chan, Shih-Fang Tzou
  • Patent number: 11393826
    Abstract: A method of forming a semiconductor device includes the following steps. First of all, a substrate is provided, and a dielectric layer is formed on the substrate. Then, at least one trench is formed in the dielectric layer, to partially expose a top surface of the substrate. The trench includes a discontinuous sidewall having a turning portion. Next, a first deposition process is performed, to deposit a first semiconductor layer to fill up the trench and to further cover on the top surface of the dielectric layer. Following these, the first semiconductor layer is laterally etched, to partially remove the first semiconductor layer till exposing the turning portion of the trench. Finally, a second deposition is performed, to deposit a second semiconductor layer to fill up the trench.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: July 19, 2022
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Luo-Hsin Lee, Ting-Pang Chung, Shih-Han Hung, Po-Han Wu, Shu-Yen Chan, Shih-Fang Tzou
  • Patent number: 11233057
    Abstract: A semiconductor structure includes an active area in a substrate, a device isolation region surrounding the active area, first and second bit line structures on the substrate, a conductive diffusion region in the active area between the first and the second bit line structures, and a contact hole between the first and the second bit line structures. The contact hole partially exposes the conductive diffusion region. A buried plug layer is disposed in the contact hole and in direct contact with the conductive diffusion region. A storage node contact layer is disposed on the buried plug layer within the contact hole. The storage node contact layer has a downwardly protruding portion surrounded by the buried plug layer. The buried plug layer has a U-shaped cross-sectional profile.
    Type: Grant
    Filed: December 2, 2019
    Date of Patent: January 25, 2022
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Po-Han Wu, Li-Wei Feng, Shih-Han Hung, Fu-Che Lee, Chien-Cheng Tsai
  • Patent number: 10777559
    Abstract: A semiconductor memory device includes a semiconductor substrate, bit line structures, storage node contacts, isolation structures, a first spacer, a second spacer, and a third spacer. Each bit line structure is elongated in a first direction. The bit line structures are repeatedly arranged in a second direction. Each storage node contact and each isolation structure are disposed between two adjacent bit line structures. The first spacer is partly disposed between each isolation structure and the bit line structure adjacent to the isolation structure and partly disposed between each storage node contact and the bit line structure adjacent to the storage node contact. The second spacer is disposed between each storage node contact and the first spacer. The third spacer is disposed between each storage node contact and the second spacer. A thickness of the third spacer is less than a thickness of the second spacer in the second direction.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: September 15, 2020
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Han Wu, Feng-Yi Chang, Fu-Che Lee, Wen-Chieh Lu
  • Publication number: 20200273862
    Abstract: A semiconductor memory device includes a semiconductor substrate, bit line structures, storage node contacts, isolation structures, a first spacer, a second spacer, and a third spacer. Each bit line structure is elongated in a first direction. The bit line structures are repeatedly arranged in a second direction. Each storage node contact and each isolation structure are disposed between two adjacent bit line structures. The first spacer is partly disposed between each isolation structure and the bit line structure adjacent to the isolation structure and partly disposed between each storage node contact and the bit line structure adjacent to the storage node contact. The second spacer is disposed between each storage node contact and the first spacer. The third spacer is disposed between each storage node contact and the second spacer. A thickness of the third spacer is less than a thickness of the second spacer in the second direction.
    Type: Application
    Filed: March 22, 2019
    Publication date: August 27, 2020
    Inventors: Po-Han Wu, Feng-Yi Chang, Fu-Che Lee, Wen-Chieh Lu
  • Publication number: 20200105763
    Abstract: A semiconductor structure includes an active area in a substrate, a device isolation region surrounding the active area, first and second bit line structures on the substrate, a conductive diffusion region in the active area between the first and the second bit line structures, and a contact hole between the first and the second bit line structures. The contact hole partially exposes the conductive diffusion region. A buried plug layer is disposed in the contact hole and in direct contact with the conductive diffusion region. A storage node contact layer is disposed on the buried plug layer within the contact hole. The storage node contact layer has a downwardly protruding portion surrounded by the buried plug layer. The buried plug layer has a U-shaped cross-sectional profile.
    Type: Application
    Filed: December 2, 2019
    Publication date: April 2, 2020
    Inventors: Po-Han Wu, Li-Wei Feng, Shih-Han Hung, Fu-Che Lee, Chien-Cheng Tsai
  • Patent number: 10529719
    Abstract: A semiconductor structure includes an active area in a substrate, a device isolation region surrounding the active area, first and second bit line structures on the substrate, a conductive diffusion region in the active area between the first and the second bit line structures, and a contact hole between the first and the second bit line structures. The contact hole partially exposes the conductive diffusion region. A buried plug layer is disposed in the contact hole and in direct contact with the conductive diffusion region. A storage node contact layer is disposed on the buried plug layer within the contact hole. The storage node contact layer has a downwardly protruding portion surrounded by the buried plug layer. The buried plug layer has a U-shaped cross-sectional profile.
    Type: Grant
    Filed: April 24, 2018
    Date of Patent: January 7, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Po-Han Wu, Li-Wei Feng, Shih-Han Hung, Fu-Che Lee, Chien-Cheng Tsai
  • Patent number: 10475794
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first bit line structure on a substrate; forming a first spacer adjacent to the first bit line structure; forming an interlayer dielectric (ILD) layer adjacent to the first spacer; removing part of the ILD layer and part of the first spacer to expose a sidewall of the first bit line structure; and forming a first storage node contact isolation structure adjacent to the first bit line structure, wherein the first storage node contact isolation structure contacts the first bit line structure and the first spacer directly.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: November 12, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Po-Han Wu, Fu-Che Lee, Chien-Cheng Tsai, Tzu-Tsen Liu, Wen-Chieh Lu
  • Publication number: 20190296019
    Abstract: A semiconductor structure includes an active area in a substrate, a device isolation region surrounding the active area, first and second bit line structures on the substrate, a conductive diffusion region in the active area between the first and the second bit line structures, and a contact hole between the first and the second bit line structures. The contact hole partially exposes the conductive diffusion region. A buried plug layer is disposed in the contact hole and in direct contact with the conductive diffusion region. A storage node contact layer is disposed on the buried plug layer within the contact hole. The storage node contact layer has a downwardly protruding portion surrounded by the buried plug layer. The buried plug layer has a U-shaped cross-sectional profile.
    Type: Application
    Filed: April 24, 2018
    Publication date: September 26, 2019
    Inventors: Po-Han Wu, Li-Wei Feng, Shih-Han Hung, Fu-Che Lee, Chien-Cheng Tsai
  • Publication number: 20190181141
    Abstract: A method of forming a semiconductor device includes the following steps. First of all, a substrate is provided, and a dielectric layer is formed on the substrate. Then, at least one trench is formed in the dielectric layer, to partially expose a top surface of the substrate. The trench includes a discontinuous sidewall having a turning portion. Next, a first deposition process is performed, to deposit a first semiconductor layer to fill up the trench and to further cover on the top surface of the dielectric layer. Following these, the first semiconductor layer is laterally etched, to partially remove the first semiconductor layer till exposing the turning portion of the trench.
    Type: Application
    Filed: October 31, 2018
    Publication date: June 13, 2019
    Inventors: Luo-Hsin Lee, Ting-Pang Chung, Shih-Han Hung, Po-Han Wu, Shu-Yen Chan, Shih-Fang Tzou