Abstract: A semiconductor reaction device and a semiconductor reaction method are disclosed. The semiconductor reaction device includes a vacuum chamber, a stage unit, a heating unit, and a first lifting mechanism. The stage unit carries a substrate. When the stage unit drives the substrate to rise, the substrate separates the vacuum chamber to form a reaction space and a bottom space. The heating unit is disposed in the vacuum chamber. The heating unit and the substrate are located on opposite sides of the stage unit. The first lifting mechanism connects with the heating unit so as to move the heating unit, so that the heating unit is movable relative to the stage unit. When the substrate rises to form the reaction space, the distance between the heating unit and the substrate is changed by the first lifting mechanism, thereby changing the temperature of the substrate.

Abstract: The automatic ball collection system contains a blower sub-system and a collection device. The blower sub-system drives the balls on the ground towards the collection device, and the balls are then automatically collected by the collection device. The blower sub-system contains a number of blowing devices configured at the corners capable of producing air flow substantially along ground surface so as to push the balls to roll towards the collection device. As such, the players' time and effort in constant bending and picking up balls, and the possible injury resulted as such are avoided.