Abstract: A method of estimating the capability of a semiconductor manufacturing system is provided. Plural first transistors are formed and a first VtMM value and a first scale value are obtained. Plural second transistors are formed and a second VtMM value and a second scale value are obtained. Plural third transistors are formed and a third VtMM value and a third scale value are obtained. A first channel length of the first transistor is smaller than a second channel length of the second transistor and is equal to a third channel length of the third transistor. A VtMM v.s. scale figure is established. A line is formed by linking the first dot and the third dot and a vertical Gap between the line and the second dot is measured. The capability of the semiconductor system is determined based on the vertical Gap. The invention further provides a chip.